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Financial Statement Components - Selected Financial Statement Components (Details) - USD ($) $ in Thousands | 6 Months Ended |
--- | --- | ---
Jun. 27, 2015 | Jun. 28, 2014 | Dec. 27, 2014
Inventories: |  |  |
Raw materials and sub-assemblies | $ 23,676 |  | $ 19,463
Work in process | 11,003 |  | 7,723
Finished goods | 6,860 |  | 7,919
Inventories | 41,539 |  | 35,105
Inventories-delivered systems | 1,574 |  | 1,912
Total inventories | 43,113 |  | 37,017
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | 80,183 |  | 78,348
Accumulated depreciation and amortization | (32,642) |  | (28,715)
Total property, plant and equipment, net | 47,541 |  | 49,633
Depreciation and amortization expense | 3,400 | $ 3,200 |
Accrued warranty | 3,792 |  | 2,953
Accrued restructuring | 424 |  | 997
Accrued professional services | 787 |  | 778
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition | 1,119 |  | 1,385
Other | 2,099 |  | 2,152
Total other current liabilities | 8,221 |  | 8,265
Land [Member] |  |  |
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | 15,572 |  | 15,572
Building and improvements [Member] |  |  |
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | 19,817 |  | 19,641
Machinery and equipment [Member] |  |  |
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | 31,017 |  | 29,456
Furniture and fixtures [Member] |  |  |
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | 2,258 |  | 2,225
Software [Member] |  |  |
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | 7,965 |  | 7,942
Capital in progress [Member] |  |  |
Property, Plant and Equipment [Line Items] |  |  |
Total property, plant and equipment, gross | $ 3,554 |  | $ 3,512

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