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Financial Statement Components - Selected Financial Statement Components (Details) - USD ($) $ in Thousands | 3 Months Ended | 9 Months Ended |
--- | --- | --- | ---
Sep. 26, 2015 | Sep. 27, 2014 | Sep. 26, 2015 | Sep. 27, 2014 | Dec. 27, 2014
Inventories: |  |  |  |  |
Raw materials and sub-assemblies | $ 24,999 |  | $ 24,999 |  | $ 19,463
Work in process | 14,463 |  | 14,463 |  | 7,723
Finished goods | 8,936 |  | 8,936 |  | 7,919
Inventories | 48,398 |  | 48,398 |  | 35,105
Inventories-delivered systems | 1,543 |  | 1,543 |  | 1,912
Total inventories | 49,941 |  | 49,941 |  | 37,017
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | 80,220 |  | 80,220 |  | 78,348
Accumulated depreciation and amortization | (34,276) |  | (34,276) |  | (28,715)
Total property, plant and equipment, net | 45,944 |  | 45,944 |  | 49,633
Depreciation and amortization expense | 1,800 | $ 1,700 | 5,200 | $ 4,900 |
Accrued warranty | 4,291 |  | 4,291 |  | 2,953
Accrued restructuring | 341 |  | 341 |  | 997
Accrued professional services | 671 |  | 671 |  | 778
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition | 1,159 |  | 1,159 |  | 1,385
Other | 2,960 |  | 2,960 |  | 2,152
Total other current liabilities | 9,422 |  | 9,422 |  | 8,265
Land [Member] |  |  |  |  |
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | 15,568 |  | 15,568 |  | 15,572
Building and improvements [Member] |  |  |  |  |
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | 19,795 |  | 19,795 |  | 19,641
Machinery and equipment [Member] |  |  |  |  |
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | 32,085 |  | 32,085 |  | 29,456
Furniture and fixtures [Member] |  |  |  |  |
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | 2,264 |  | 2,264 |  | 2,225
Software [Member] |  |  |  |  |
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | 8,094 |  | 8,094 |  | 7,942
Capital in progress [Member] |  |  |  |  |
Property, Plant and Equipment [Line Items] |  |  |  |  |
Total property, plant and equipment, gross | $ 2,414 |  | $ 2,414 |  | $ 3,512

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