XML 73 R60.htm IDEA: XBRL DOCUMENT
v3.3.1.900

Commitments and Contingencies - Textual (Details) - USD ($) | 12 Months Ended
--- | ---
Dec. 26, 2015 | Dec. 27, 2014 | Dec. 28, 2013
Long Term Purchase Commitment [Line Items] |  |  |
Liabilities recorded for obligations | $ 0 | $ 0 |
Rent expense | 1,700,000 | 2,000,000 | $ 2,200,000
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member] |  |  |
Long Term Purchase Commitment [Line Items] |  |  |
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value | 1,500,000 | $ 2,400,000 |
Inventories [Member] |  |  |
Long Term Purchase Commitment [Line Items] |  |  |
Purchase commitment | 24,900,000 |  |
Inventories [Member] | Zygo Corporation [Member] |  |  |
Long Term Purchase Commitment [Line Items] |  |  |
Purchase commitment, estimated future amount | $ 1,800,000 |  |

X
- Definition Intellectual property indemnification obligations. + References No definition available. + Details
Name: | nano_IntellectualPropertyIndemnificationObligations
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Long term purchase commitment, estimated future amount. + References No definition available. + Details
Name: | nano_LongTermPurchaseCommitmentEstimatedFutureAmount
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of liabilities assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=56956791&loc=d3e4845-128472 + Details
Name: | us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Amount of rent expense incurred for leased assets, including but not limited to, furniture and equipment, that is not directly or indirectly associated with the manufacture, sale or creation of a product or product line. + References No definition available. + Details
Name: | us-gaap_LeaseAndRentalExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition The minimum amount the entity agreed to spend under the long-term purchase commitment. + References No definition available. + Details
Name: | us-gaap_LongTermPurchaseCommitmentAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_LongTermPurchaseCommitmentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=nano_ZygoCorporationMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_LongTermPurchaseCommitmentByCategoryOfItemPurchasedAxis=us-gaap_InventoriesMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |