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Financial Statement Components - Selected Financial Statement Components (Details) - USD ($) $ in Thousands | 12 Months Ended
--- | ---
Dec. 26, 2015 | Dec. 27, 2014 | Dec. 28, 2013
Inventories: |  |  |
Raw materials and sub-assemblies | $ 26,784 | $ 19,463 |
Work in process | 12,862 | 7,723 |
Finished goods | 8,103 | 7,919 |
Inventories | 47,749 | 35,105 |
Inventories-delivered systems | 2,856 | 1,912 |
Total inventories | 50,605 | 37,017 |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | 80,561 | 78,348 |
Accumulated depreciation and amortization | (36,068) | (28,715) |
Total property, plant and equipment, net | 44,493 | 49,633 |
Depreciation and amortization expense | 6,900 | 6,600 | $ 5,400
Accrued warranty | 4,504 | 2,953 |
Accrued restructuring | 256 | 997 |
Accrued professional services | 481 | 778 |
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition | 945 | 1,385 |
Other | 2,692 | 2,152 |
Total other current liabilities | 8,878 | 8,265 |
Land [Member] |  |  |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | 15,569 | 15,572 |
Building and improvements [Member] |  |  |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | 20,158 | 19,641 |
Machinery and equipment [Member] |  |  |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | 32,995 | 29,456 |
Furniture and fixtures [Member] |  |  |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | 2,266 | 2,225 |
Software [Member] |  |  |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | 8,245 | 7,942 |
Capital in progress [Member] |  |  |
Property, plant and equipment, net: |  |  |
Total property, plant and equipment, gross | $ 1,328 | $ 3,512 |

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