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Financial Statement Components - Selected Financial Statement Components (Details) - USD ($) $ in Thousands | 3 Months Ended | 6 Months Ended |  |  |  |
--- | --- | --- | --- | --- | --- | ---
Jun. 25, 2016 | Jun. 27, 2015 | Jun. 25, 2016 | Jun. 27, 2015 | Mar. 26, 2016 | Dec. 26, 2015 | Mar. 28, 2015 | Dec. 27, 2014
Inventories: |  |  |  |  |  |  |  |
Raw materials and sub-assemblies | $ 24,011 |  | $ 24,011 |  |  | $ 26,784 |  |
Work in process | 11,668 |  | 11,668 |  |  | 12,862 |  |
Finished goods | 5,432 |  | 5,432 |  |  | 8,103 |  |
Inventories | 41,111 |  | 41,111 |  |  | 47,749 |  |
Inventories-delivered systems | 9,594 |  | 9,594 |  |  | 2,856 |  |
Total inventories | 50,705 |  | 50,705 |  |  | 50,605 |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | 83,039 |  | 83,039 |  |  | 80,561 |  |
Accumulated depreciation and amortization | (39,555) |  | (39,555) |  |  | (36,068) |  |
Total property, plant and equipment, net | 43,484 |  | 43,484 |  |  | 44,493 |  |
Depreciation and amortization expense | 1,700 | $ 1,700 | 3,400 | $ 3,400 |  |  |  |
Accrued warranty | 4,556 | 3,792 | 4,556 | 3,792 | $ 4,377 | 4,504 | $ 3,440 | $ 2,953
Accrued restructuring | 27 | $ 424 | 27 | $ 424 |  | 256 |  | $ 997
Accrued professional services | 502 |  | 502 |  |  | 481 |  |
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition | 732 |  | 732 |  |  | 945 |  |
Other | 3,516 |  | 3,516 |  |  | 2,692 |  |
Total other current liabilities | 9,333 |  | 9,333 |  |  | 8,878 |  |
Land [Member] |  |  |  |  |  |  |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | 15,569 |  | 15,569 |  |  | 15,569 |  |
Building and improvements [Member] |  |  |  |  |  |  |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | 20,400 |  | 20,400 |  |  | 20,158 |  |
Machinery and equipment [Member] |  |  |  |  |  |  |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | 33,873 |  | 33,873 |  |  | 32,995 |  |
Furniture and fixtures [Member] |  |  |  |  |  |  |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | 2,310 |  | 2,310 |  |  | 2,266 |  |
Software [Member] |  |  |  |  |  |  |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | 8,833 |  | 8,833 |  |  | 8,245 |  |
Capital in progress [Member] |  |  |  |  |  |  |  |
Property, plant and equipment, net: |  |  |  |  |  |  |  |
Total property, plant and equipment, gross | $ 2,054 |  | $ 2,054 |  |  | $ 1,328 |  |

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