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Commitments and Contingencies - Textual (Details) - USD ($) | 12 Months Ended
--- | ---
Dec. 31, 2016 | Dec. 26, 2015 | Dec. 27, 2014
Long Term Purchase Commitment [Line Items] |  |  |
Liabilities recorded for obligations | $ 0 | $ 0 |
Rent expense | 1,800,000 | 1,700,000 | $ 2,000,000
Zygo Corporation [Member] |  |  |
Long Term Purchase Commitment [Line Items] |  |  |
Payments for royalty | 300,000 | $ 900,000 |
Inventories [Member] |  |  |
Long Term Purchase Commitment [Line Items] |  |  |
Purchase commitment | $ 30,600,000 |  |

X
- Definition Intellectual property indemnification obligations. + References No definition available. + Details
Name: | nano_IntellectualPropertyIndemnificationObligations
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Payments for royalties and sustaining engineering. + References No definition available. + Details
Name: | nano_PaymentsForRoyaltiesAndSustainingEngineering
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of rent expense incurred for leased assets, including but not limited to, furniture and equipment, that is not directly or indirectly associated with the manufacture, sale or creation of a product or product line. + References No definition available. + Details
Name: | us-gaap_LeaseAndRentalExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition The minimum amount the entity agreed to spend under the long-term purchase commitment. + References No definition available. + Details
Name: | us-gaap_LongTermPurchaseCommitmentAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_LongTermPurchaseCommitmentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=nano_ZygoCorporationMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_LongTermPurchaseCommitmentByCategoryOfItemPurchasedAxis=us-gaap_InventoriesMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |