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Subsequent Event	6 Months Ended
	Jun. 30, 2018
Subsequent Events [Abstract]
Subsequent Event	Note 14: Subsequent Event In connection with the June 25, 2018 departure from Nanometrics of Johnathan H. Chou, Nanometrics’ former Chief Financial Officer, on July 11, 2018, Nanometrics and Mr. Chou entered into a separation and release agreement. Pursuant to the separation and release agreement, Nanometrics agreed to pay Mr. Chou a severance payment of $150,000.00 and to pay COBRA premiums for Mr. Chou and his covered dependents until June 30, 2019. These severance arrangements supersede Mr. Chou’s general severance benefits and change in control severance benefits agreement.

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- Definition

The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 855
-URI http://asc.fasb.org/topic&trid=2122774

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