EX-21.1 3 nano-ex211_12.htm EX-21.1

Exhibit 21.1

List of Subsidiaries

Name |  | Jurisdiction
Nanometrics France SAS |  | France
Accent Optical Technologies Germany GmbH |  | Germany
Nanometrics (Switzerland) GmbH |  | Switzerland
Nanometrics UK Ltd. |  | United Kingdom
Nanometrics China Co. Ltd. |  | China
Nanometrics Israel Ltd. |  | Israel
Nanometrics Japan Ltd. |  | Japan
Nanometrics Korea Ltd. |  | South Korea
Nanometrics Southeast Asia Pte. Ltd. |  | Singapore
Nanometrics Metrology Ireland Limited 4D Technology Corporation Nanometrics Taiwan Branch Nanda Technologies GmbH (desolved) |  | Ireland United States Taiwan Germany