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Commitments and Contingencies - Textual (Details) |  | 9 Months Ended |
--- | --- | --- | ---
Oct. 25, 2019 $ / shares | Sep. 28, 2019 USD ($) Complaint $ / shares | Dec. 29, 2018 USD ($) $ / shares
Commitments And Contingencies [Line Items] |  |  |
Common stock, par value | $ / shares |  | $ 0.001 | $ 0.001
Liabilities recorded for obligations | $ |  | $ 0 | $ 0
Number of complaints filed |  | 5 |
Number of defendants |  | 1 |
United States District Court for District of Delaware [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Number of complaints filed |  | 3 |
United States District Court for District of New Jersey [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Number of complaints filed |  | 1 |
United States District Court for District of Massachusetts [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Number of complaints filed |  | 1 |
Rudolph Technologies, Inc. [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Number of complaints filed |  | 2 |
Rudolph and Directors [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Number of complaints filed |  | 3 |
Subsequent Event [Member] | Parent Company [Member] | Combined Entity [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Ownership percentage | 50.00% |  |
Subsequent Event [Member] | Rudolph Technologies, Inc. [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Common stock, par value | $ / shares | $ 0.001 |  |
Common stock conversion ratio | 0.8042 |  |
Subsequent Event [Member] | Rudolph Technologies, Inc. [Member] | Combined Entity [Member] |  |  |
Commitments And Contingencies [Line Items] |  |  |
Ownership percentage | 50.00% |  |

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- Definition Commitments and contingencies. + References No definition available. + Details
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- Definition Intellectual property indemnification obligations. + References No definition available. + Details
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- Definition Face amount or stated value per share of common stock. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02(29)) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 + Details
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