<SEC-DOCUMENT>0000899243-19-026352.txt : 20191030
<SEC-HEADER>0000899243-19-026352.hdr.sgml : 20191030
<ACCEPTANCE-DATETIME>20191030163052
ACCESSION NUMBER:		0000899243-19-026352
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20191025
FILED AS OF DATE:		20191030
DATE AS OF CHANGE:		20191030

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Chan Chun Hoy
		CENTRAL INDEX KEY:			0001631609

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		191180636

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>doc4.xml
<DESCRIPTION>FORM 4 SUBMISSION
<TEXT>
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    <schemaVersion>X0306</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2019-10-25</periodOfReport>

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    <issuer>
        <issuerCik>0000704532</issuerCik>
        <issuerName>Onto Innovation Inc.</issuerName>
        <issuerTradingSymbol>ONTO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001631609</rptOwnerCik>
            <rptOwnerName>Chan Chun Hoy</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ONTO INNOVATION INC.</rptOwnerStreet1>
            <rptOwnerStreet2>16 JONSPIN ROAD</rptOwnerStreet2>
            <rptOwnerCity>WILMINGTON</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01887</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
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        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>1</isOther>
            <otherText>Vice President, Sales</otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2019-10-25</value>
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                    <value>D</value>
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                <value>Common Stock</value>
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                <value></value>
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                    <value>9267</value>
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                <sharesOwnedFollowingTransaction>
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    <footnotes>
        <footnote id="F1">On October 25, 2019, pursuant to an Agreement and Plan of Merger (the &quot;Merger Agreement&quot;), Rudolph Technologies, Inc. (&quot;Rudolph&quot;) and Nanometrics Incorporated (&quot;Nanometrics&quot;) effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the &quot;Merger&quot;). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to &quot;Onto Innovation Inc.&quot; (&quot;Onto Innovation&quot;) and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the &quot;Exchange Ratio&quot;), with cash paid in lieu of fractional shares.</footnote>
        <footnote id="F2">These restricted stock units (&quot;RSUs&quot;) were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the &quot;Plan&quot;) and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>/s/ Robert A. Koch For: Chun Hoy Chan</signatureName>
        <signatureDate>2019-10-29</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
