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Document and Entity Information
Oct. 25, 2019
Cover [Abstract]  
Amendment Flag true
Entity Central Index Key 0000704532
Document Type 8-K/A
Document Period End Date Oct. 25, 2019
Entity Registrant Name ONTO INNOVATION INC.
Entity Incorporation, State or Country Code DE
Entity File Number 001-39110
Entity Tax Identification Number 94-2276314
Entity Address, Address Line One 16 Jonspin Road
Entity Address, City or Town Wilmington
Entity Address, State or Province MA
Entity Address, Postal Zip Code 01887
City Area Code 978
Local Phone Number 253-6200
Written Communications false
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Title of 12(b) Security Common Stock, $0.001 par value per share
Trading Symbol ONTO
Security Exchange Name NYSE
Entity Emerging Growth Company false
Amendment Description On October 28, 2019, Onto Innovation Inc. (“Onto Innovation”) filed with the Securities and Exchange Commission (the “SEC”) a Current Report on Form 8-K (the “Initial Form 8-K”) disclosing that on October 25, 2019, pursuant to an Agreement and Plan of Merger, dated as of June 23, 2019, with Rudolph Technologies, Inc., a Delaware corporation (“Rudolph”), and PV Equipment Inc., a Delaware corporation and a direct wholly-owned subsidiary of Nanometrics (“Merger Sub”), Merger Sub merged with and into Rudolph, with Rudolph continuing as the surviving corporation and a direct wholly-owned subsidiary of Onto Innovation (the “Merger”). In the Initial Form 8-K, Onto Innovation stated its intention to file the historical financial statements of Rudolph and the pro forma financial information required by parts (a) and (b) of Item 9.01 of Form 8-K not later than 71 calendar days after the date that the Initial Form 8-K was required to be filed with the SEC. Pursuant to the instructions to Item 9.01 of Form 8-K, this Amendment No. 1 to Current Report on Form 8-K/A amends the Initial 8-K in order to provide the required financial information.