<SEC-DOCUMENT>0001564590-19-043053.txt : 20191113
<SEC-HEADER>0001564590-19-043053.hdr.sgml : 20191113
<ACCEPTANCE-DATETIME>20191112183829
ACCESSION NUMBER:		0001564590-19-043053
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		13
CONFORMED PERIOD OF REPORT:	20191111
ITEM INFORMATION:		Changes in Registrant's Certifying Accountant
FILED AS OF DATE:		20191113
DATE AS OF CHANGE:		20191112

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		191211265

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>onto-8k_20191111.htm
<DESCRIPTION>8-K
<TEXT>
<XBRL>
<?xml  version="1.0" encoding="utf-8"?>
<!-- DFIN ActiveDisclosure(SM) Inline XBRL Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2019-11-12T22:36:39.6981007+00:00 -->
<!-- Version            : 5.0.0.208 -->
<!-- Package ID         : e348f7368b2844c0890e0ef4badcf432 -->
<!-- Copyright (c) 2019 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<html xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:onto="http://www.ontoinnovation.com/20191111" xmlns:us-types="http://fasb.org/us-types/2019-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2019-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2018-01-31" xmlns:srt-types="http://fasb.org/srt-types/2019-01-31" xmlns:srt="http://fasb.org/srt/2019-01-31" xmlns:sic="http://xbrl.sec.gov/sic/2011-01-31" xmlns:naics="http://xbrl.sec.gov/naics/2017-01-31" xmlns:invest="http://xbrl.sec.gov/invest/2013-01-31" xmlns:exch="http://xbrl.sec.gov/exch/2019-01-31" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:dei="http://xbrl.sec.gov/dei/2019-01-31" xmlns:currency="http://xbrl.sec.gov/currency/2019-01-31" xmlns:country="http://xbrl.sec.gov/country/2017-01-31" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:utr="http://www.xbrl.org/2009/utr" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2015-02-26" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns="http://www.w3.org/1999/xhtml">
<head>
<meta http-equiv="Content-Type" content="text/html" />
<title>
onto-8k_20191111.htm
</title>
</head>
<!-- NG Converter v5.0.19273.161 -->
<body><div style="display:none">
	<ix:header>
		<ix:hidden>
			<ix:nonNumeric id="F_000001" name="dei:AmendmentFlag" contextRef="C_0000704532_20191111_20191111">false</ix:nonNumeric>
			<ix:nonNumeric id="F_000004" name="dei:EntityCentralIndexKey" contextRef="C_0000704532_20191111_20191111">0000704532</ix:nonNumeric>
		</ix:hidden>
		<ix:references>
			<link:schemaRef xlink:type="simple" xlink:href="onto-20191111.xsd" xlink:arcrole="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:link="http://www.xbrl.org/2003/linkbase"></link:schemaRef>
		</ix:references>
		<ix:resources>
			<xbrli:context id="C_0000704532_20191111_20191111">
				<xbrli:entity>
					<xbrli:identifier scheme="http://www.sec.gov/CIK">0000704532</xbrli:identifier>
				</xbrli:entity>
				<xbrli:period>
					<xbrli:startDate>2019-11-11</xbrli:startDate>
					<xbrli:endDate>2019-11-11</xbrli:endDate>
				</xbrli:period>
			</xbrli:context>
		</ix:resources>
	</ix:header>
</div>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-size:16pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">UNITED STATES</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-size:16pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">SECURITIES AND EXCHANGE COMMISSION</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:14pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Washington, D.C. 20549</p>
<p style="text-align:center;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-weight:bold;;font-size:5pt;">&#160;</p>
<p style="text-align:center;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-weight:bold;font-size:20pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">FORM <ix:nonNumeric id="F_000000" name="dei:DocumentType" contextRef="C_0000704532_20191111_20191111">8-K</ix:nonNumeric></p>
<p style="text-align:center;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">CURRENT REPORT</p>
<p style="text-align:center;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934</p>
<p style="text-align:center;margin-bottom:12pt;margin-top:5pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Date of Report (Date of earliest event reported): <ix:nonNumeric id="F_000002" name="dei:DocumentPeriodEndDate" contextRef="C_0000704532_20191111_20191111" format="ixt:datemonthdayyearen">November 11, 2019</ix:nonNumeric><span style="font-size:12pt;"> </span></p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:71.5%;">
<tr>
<td colspan="3" valign="middle" style="padding-left:3pt;padding-Right:3pt;width:92.02%; border-bottom:solid 1pt #000000;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:36pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:20pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000003" name="dei:EntityRegistrantName" contextRef="C_0000704532_20191111_20191111">

ONTO INNOVATION INC.
</ix:nonNumeric></p></td>
</tr>
<tr>
<td colspan="3" valign="middle" style="padding-left:3pt;padding-Right:3pt;width:92.02%;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:36pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(Exact name of registrant as specified in its charter)</p></td>
<td style="border:none;padding:0;"></td>
</tr>
<tr>
<td valign="middle" style="padding-left:3pt;padding-Right:3pt;width:33.36%; border-bottom:solid 1pt #000000;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;text-transform:uppercase;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;font-variant: normal;"><ix:nonNumeric id="F_000007" name="dei:EntityIncorporationStateCountryCode" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:stateprovnameen">Delaware</ix:nonNumeric></p></td>
<td valign="middle" style="padding-left:3pt;padding-Right:3pt;width:33.34%; border-bottom:solid 1pt #000000;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000006" name="dei:EntityFileNumber" contextRef="C_0000704532_20191111_20191111">001-39110</ix:nonNumeric></p></td>
<td colspan="2" valign="middle" style="padding-left:3pt;padding-Right:3pt;width:33.32%; border-bottom:solid 1pt #000000;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000008" name="dei:EntityTaxIdentificationNumber" contextRef="C_0000704532_20191111_20191111">94-2276314</ix:nonNumeric></p></td>
</tr>
<tr>
<td valign="middle" style="padding-left:3pt;padding-Right:3pt;width:33.36%;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(State or other jurisdiction of incorporation)</p></td>
<td valign="middle" style="padding-left:3pt;padding-Right:3pt;width:33.34%;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(Commission File Number)</p></td>
<td colspan="2" valign="middle" style="padding-left:3pt;padding-Right:3pt;width:33.32%;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(IRS Employer Identification No.)</p></td>
</tr>
<tr>
<td colspan="3" valign="middle" style="padding-left:3pt;padding-Right:3pt;width:92.02%; border-bottom:solid 1pt #000000;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-size:12pt;">&#160;</p>
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-size:12pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000009" name="dei:EntityAddressAddressLine1" contextRef="C_0000704532_20191111_20191111">16 Jonspin Road</ix:nonNumeric>, <ix:nonNumeric id="F_000010" name="dei:EntityAddressCityOrTown" contextRef="C_0000704532_20191111_20191111">Wilmington</ix:nonNumeric>, <ix:nonNumeric id="F_000011" name="dei:EntityAddressStateOrProvince" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:stateprovnameen">Massachusetts</ix:nonNumeric> <ix:nonNumeric id="F_000012" name="dei:EntityAddressPostalZipCode" contextRef="C_0000704532_20191111_20191111">01887</ix:nonNumeric></p></td>
<td style="border:none;padding:0;"></td>
</tr>
<tr>
<td colspan="3" valign="middle" style="padding-left:3pt;padding-Right:3pt;width:92.02%;">
<p style="text-align:center;margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(Address of principal executive offices) (Zip code)</p></td>
<td style="border:none;padding:0;"></td>
</tr>
</table></div>
<p style="text-align:center;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Registrant's telephone number, including area code: (<ix:nonNumeric id="F_000013" name="dei:CityAreaCode" contextRef="C_0000704532_20191111_20191111">978</ix:nonNumeric>) <ix:nonNumeric id="F_000014" name="dei:LocalPhoneNumber" contextRef="C_0000704532_20191111_20191111">253-6200</ix:nonNumeric></p>
<p style="text-align:center;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> (Former name or former address, if changed since last report): Not applicable</p>
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr style="height:24.05pt;">
<td valign="top" style="width:4%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000015" name="dei:WrittenCommunications" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></p></td>
<td valign="top" style="width:50%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)</p></td>
</tr>
<tr>
<td valign="top" style="width:4%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000016" name="dei:SolicitingMaterial" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric><span style="font-family:Times New Roman;"> </span></p></td>
<td valign="top" style="width:50%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)</p></td>
</tr>
<tr>
<td valign="top" style="width:4%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000017" name="dei:PreCommencementTenderOffer" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric><span style="font-family:Times New Roman;"> </span></p></td>
<td valign="top" style="width:50%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))</p></td>
</tr>
<tr>
<td valign="top" style="width:4%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000018" name="dei:PreCommencementIssuerTenderOffer" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></p></td>
<td valign="top" style="width:50%;">
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))</p></td>
</tr>
</table></div>
<p style="margin-top:9pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (&#167;&#8201;230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (&#167;&#8201;240.12b-2 of this chapter).</p>
<p style="margin-top:9pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Emerging growth company&#160;<span style="font-family:Segoe UI Symbol;"><ix:nonNumeric id="F_000005" name="dei:EntityEmergingGrowthCompany" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></span></p>
<p style="margin-top:9pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.&#160;<span style="font-family:Segoe UI Symbol;">&#9744;</span></p>
<p style="margin-top:9pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Securities registered pursuant to Section 12(b) of the Act:</p>
<p style="text-align:justify;margin-bottom:5pt;margin-top:5pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div style="align:left;">
<table border="0" cellspacing="0" cellpadding="0" style="border-collapse:collapse; width:98.39%;">
<tr>
<td style="width:35.99%;"></td>
<td style="width:27.25%;"></td>
<td style="width:35.16%;"></td>
</tr>
<tr>
<td valign="top" style=" border-top:solid 0.75pt #000000; border-left:solid 0.75pt #000000; border-bottom:solid 0.75pt #000000; border-right:solid 0.75pt #000000;">
<p style="text-align:center;margin-top:4pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Title of Each Class</p></td>
<td valign="top" style=" border-top:solid 0.75pt #000000; border-bottom:solid 0.75pt #000000; border-left:solid 0.75pt #000000; border-right:solid 0.75pt #000000;">
<p style="text-align:center;margin-top:4pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Trading Symbol(s)</p></td>
<td valign="top" style=" border-top:solid 0.75pt #000000; border-right:solid 0.75pt #000000; border-bottom:solid 0.75pt #000000; border-left:solid 0.75pt #000000;">
<p style="text-align:center;margin-top:4pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Name of Each Exchange on Which Registered</p></td>
</tr>
<tr>
<td valign="top" style=" border-bottom:solid 0.75pt #000000; border-left:solid 0.75pt #000000; border-top:solid 0.75pt #000000; border-right:solid 0.75pt #000000;">
<p style="text-align:center;margin-top:4pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000019" name="dei:Security12bTitle" contextRef="C_0000704532_20191111_20191111">Common Stock, $0.001 par value per share</ix:nonNumeric></p></td>
<td valign="top" style=" border-bottom:solid 0.75pt #000000; border-top:solid 0.75pt #000000; border-left:solid 0.75pt #000000; border-right:solid 0.75pt #000000;">
<p style="text-align:center;margin-top:4pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000020" name="dei:TradingSymbol" contextRef="C_0000704532_20191111_20191111">ONTO</ix:nonNumeric></p></td>
<td valign="top" style=" border-bottom:solid 0.75pt #000000; border-right:solid 0.75pt #000000; border-top:solid 0.75pt #000000; border-left:solid 0.75pt #000000;">
<p style="text-align:center;margin-top:4pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000021" name="dei:SecurityExchangeName" contextRef="C_0000704532_20191111_20191111" format="ixt-sec:exchnameen">New York Stock Exchange</ix:nonNumeric> (NYSE)</p></td>
</tr>
</table></div>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:center;margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<hr style="page-break-after:always" />
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;" id="Item_2_02___Results_of_Operations_and_Fi"><span style="text-decoration:underline;">Item </span><span style="text-decoration:underline;">4</span><span style="text-decoration:underline;">.0</span><span style="text-decoration:underline;">1</span><span style="text-decoration:underline;">. </span><span style="text-decoration:underline;">Changes in Registrant&#8217;s Certifying Accountant</span><span style="text-decoration:underline;">.</span></p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;" id="Item_9_01__Financial_Statements_and_Exhi">&#160;</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(a) On November 11, 2019, Onto Innovation Inc., formerly Nanometrics Incorporated (&#8220;Onto Innovation&#8221;), engaged Ernst &#38; Young LLP (&#8220;EY&#8221;) as its independent registered public accounting firm for the fiscal year ending December 31, 2019, and PricewaterhouseCoopers LLP (&#8220;PwC&#8221;) resigned as the independent registered public accounting firm, following the merger of a direct wholly-owned subsidiary of Onto Innovation with and into Rudolph Technologies, Inc. (&#8220;Rudolph&#8221;) on October 25, 2019, as previously disclosed in Onto Innovation&#8217;s Current Report on Form 8-K filed with the Securities and Exchange Commission (the &#8220;SEC&#8221;) on October 28, 2019 (the &#8220;Merger&#8221;).&#160;&#160;The decision to change accountants was approved by the audit committee of Onto Innovation&#8217;s board of directors.</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">PwC&#8217;s reports on Nanometrics Incorporated&#8217;s financial statements for the fiscal years ended December 29, 2018 and December 30, 2017 contained no adverse opinion or disclaimer of opinion, and were not qualified or modified as to uncertainty, audit scope or accounting principle.</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">During the fiscal years ended December 29, 2018 and December 30, 2017 and the subsequent interim period through November 11, 2019, there have been no disagreements (as defined in Item 304(a)(1)(iv) of Regulation S-K and the related instructions) with PwC on any matter of accounting principles or practices, financial statement disclosure, or auditing scope or procedure, which disagreements, if not resolved to the satisfaction of PwC, would have caused PwC to make reference thereto in their reports on the financial statements for such years</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">During the fiscal years ended December 29, 2018 and December 30, 2017 and subsequent interim period through November 11, 2019, there have been no reportable events (as defined in S-K 304(a)(1)(v)), except that as disclosed in the Company's Quarterly Report on Form 10-Q for the quarterly periods ended April 1, 2017, July 1, 2017 and September 30, 2017 (the "2017 Form 10-Qs"), management concluded that a material weakness existed related to ineffective controls over the existence of inventories subject to the cycle count programs.&#160;&#160;The material weakness was remediated and described in Item 9A of the Company&#8217;s annual report on Form 10-K for the year ended December 30, 2017.</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Onto Innovation has requested that PwC furnish it with a letter addressed to the SEC stating whether or not it agrees with the above statements.&#160;&#160;A copy of the letter from PwC, dated November 12, 2019, is filed as Exhibit 16.1 and incorporated herein by reference to this Form 8-K.</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(b) On November 11, 2019, the audit committee of Onto Innovation&#8217;s board of directors approved the engagement of EY as Onto Innovation&#8217;s independent registered public accounting firm for the fiscal year ending December 31, 2019.&#160;&#160;Prior to the completion of the Merger, EY served as the independent registered public accounting firm of Rudolph.</p>
<p style="text-align:justify;margin-bottom:12pt;margin-top:0pt;text-indent:0%;font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">During the fiscal years ended December 29, 2018 and December 30, 2017, and the subsequent interim periods through November 11, 2019, neither Onto Innovation nor anyone on its behalf consulted with EY, regarding either: (i) the application of accounting principles to a specific transaction, completed or proposed, or the type of audit opinion that might be rendered on Onto Innovation&#8217;s financial statements, and neither a written report nor oral advice was provided to Onto Innovation that EY concluded was an important factor considered by Onto Innovation in reaching a decision as to any accounting, auditing or financial reporting issue, or (ii) any matter that was either the subject of a disagreement (as defined in Item 304(a)(1)(iv) of Regulation S-K and the related instructions) or a reportable event (as described in Item 304(a)(1)(v) of Regulation S-K).</p>
<p style="text-align:justify;margin-top:18pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><span style="text-decoration:underline;">Item 9.01. Financial Statements and Exhibits.</span></p>
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:4.79%;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">(d) Exhibits</p>
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:4.79%;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:12.9%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><span style="text-decoration:underline;">Exhibit No.</span></p></td>
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<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:84.76%;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><span style="text-decoration:underline;">Description of Exhibit</span></p></td>
</tr>
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<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:2.34%;">
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</tr>
<tr>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:12.9%;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><a href="onto-ex161_6.htm"><span style="text-decoration:underline;">16.1</span></a></p></td>
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<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:84.76%;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><a href="onto-ex161_6.htm"><span style="text-decoration:underline;">Letter dated November 12, 2019 from </span><span style="font-size:11pt;text-decoration:underline;">PricewaterhouseCoopers LLP to the SEC</span></a><span style="font-size:11pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">.</span></p></td>
</tr>
<tr>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:12.9%;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">104</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:2.34%;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:84.76%;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Cover Page Interactive Data File (embedded within the Inline XBRL document)</p></td>
</tr>
</table></div>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:center;margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<hr style="page-break-after:always" />
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><span style="font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">SIGNATURES</span></p>
<p style="margin-bottom:0pt;margin-top:12pt;text-indent:7.03%;color:#000000;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.</p>
<p style="text-align:center;margin-bottom:12pt;margin-top:12pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Onto Innovation Inc.</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:49.22%; border-bottom:solid 1pt transparent;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Date: November 12, 2019</p></td>
<td valign="middle" style="padding-left:3pt;padding-Right:2pt;width:50.78%; border-bottom:solid 1pt #000000;">
<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">By: /s/ Michael P. Plisinski</p></td>
</tr>
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<p style="margin-bottom:2pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:2pt;width:50.78%;">
<p style="margin-bottom:5pt;margin-top:2pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Michael P. Plisinski</p>
<p style="margin-bottom:2pt;margin-top:5pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Chief Executive Officer</p></td>
</tr>
</table></div>
<p style="margin-bottom:5pt;margin-top:8pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:center;margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p></body>
</html>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-16.1
<SEQUENCE>2
<FILENAME>onto-ex161_6.htm
<DESCRIPTION>EX-16.1
<TEXT>
<!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
<head>
<title>
onto-ex161_6.htm
</title>
</head>
<!-- NG Converter v5.0.19273.161 -->
<body>

<p style="margin-bottom:0pt;margin-top:0pt;color:#auto;font-size:10pt;font-family:Georgia;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;text-indent:7.69%;"><font style="margin-left:108pt;"></font><font style="margin-left:144pt;"></font><font style="margin-left:180pt;"></font><font style="margin-left:216pt;"></font><font style="margin-left:252pt;"></font><font style="margin-left:288pt;"></font><font style="margin-left:36pt;"></font><font style="font-weight:bold;font-family:Times New Roman;">Exhibit 16.1</font></p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;color:#auto;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">November 12, 2019</p>
<p style="margin-bottom:0pt;margin-top:0pt;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;text-indent:67.09%;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Securities and Exchange Commission</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">100 F Street, N.E.</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Washington, DC 20549</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Commissioners:</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">We have read the statements made by Onto Innovation Inc., formerly known as Nanometrics Incorporated (&#8220;Onto Innovation&#8221;) (copy attached), which we understand will be filed with the Securities and Exchange Commission, pursuant to<font style="color:#FF0000;"> </font>Item 4.01 of Form 8-K of Onto Innovation, dated November 11, 2019.&nbsp;&nbsp;We agree with the statements concerning our Firm contained therein.</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Very truly yours,</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">/s/PricewaterhouseCoopers LLP</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">San Jose, California</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">&nbsp;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:10pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Attachment</p>
<p style="margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-size:1pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">&nbsp;</p></body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>3
<FILENAME>onto-20191111.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2019-11-12T22:36:39.6981007+00:00 -->
<!-- Version            : 5.0.0.208 -->
<!-- Package ID         : e348f7368b2844c0890e0ef4badcf432 -->
<!-- Copyright (c) 2019 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<xsd:schema xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:sic="http://xbrl.sec.gov/sic/2011-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2018-01-31" xmlns:naics="http://xbrl.sec.gov/naics/2017-01-31" xmlns:invest="http://xbrl.sec.gov/invest/2013-01-31" xmlns:srt-types="http://fasb.org/srt-types/2019-01-31" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:onto="http://www.ontoinnovation.com/20191111" xmlns:srt="http://fasb.org/srt/2019-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2019-01-31" xmlns:dei="http://xbrl.sec.gov/dei/2019-01-31" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:country="http://xbrl.sec.gov/country/2017-01-31" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:currency="http://xbrl.sec.gov/currency/2019-01-31" xmlns:us-types="http://fasb.org/us-types/2019-01-31" xmlns:exch="http://xbrl.sec.gov/exch/2019-01-31" attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.ontoinnovation.com/20191111" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/instance" />
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/linkbase" />
  <xsd:import schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" namespace="http://xbrl.org/2005/xbrldt" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/country/2017/country-2017-01-31.xsd" namespace="http://xbrl.sec.gov/country/2017-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/currency/2019/currency-2019-01-31.xsd" namespace="http://xbrl.sec.gov/currency/2019-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd" namespace="http://xbrl.sec.gov/dei/2019-01-31" />
  <xsd:import schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" namespace="http://www.xbrl.org/dtr/type/non-numeric" />
  <xsd:import schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" namespace="http://www.xbrl.org/dtr/type/numeric" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/exch/2019/exch-2019-01-31.xsd" namespace="http://xbrl.sec.gov/exch/2019-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/invest/2013/invest-2013-01-31.xsd" namespace="http://xbrl.sec.gov/invest/2013-01-31" />
  <xsd:import schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" />
  <xsd:import schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/role/negated" />
  <xsd:import schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/role/net" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/naics/2017/naics-2017-01-31.xsd" namespace="http://xbrl.sec.gov/naics/2017-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/sic/2011/sic-2011-01-31.xsd" namespace="http://xbrl.sec.gov/sic/2011-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/srt/2019/elts/srt-2019-01-31.xsd" namespace="http://fasb.org/srt/2019-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/srt/2019/elts/srt-roles-2019-01-31.xsd" namespace="http://fasb.org/srt-roles/2019-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/srt/2019/elts/srt-types-2019-01-31.xsd" namespace="http://fasb.org/srt-types/2019-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/stpr/2018/stpr-2018-01-31.xsd" namespace="http://xbrl.sec.gov/stpr/2018-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd" namespace="http://fasb.org/us-gaap/2019-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/us-gaap/2019/elts/us-roles-2019-01-31.xsd" namespace="http://fasb.org/us-roles/2019-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/us-gaap/2019/elts/us-types-2019-01-31.xsd" namespace="http://fasb.org/us-types/2019-01-31" />
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType id="TemplateLink" roleURI="http://www.ontoinnovation.com/20191111/role/TemplateLink" xmlns:link="http://www.xbrl.org/2003/linkbase">
        <link:definition>00000 - Document - Template Link</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="onto-20191111_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:title="Label Links, all" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="onto-20191111_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:title="Presentation Links, all" xlink:type="simple" />
      <link:roleType roleURI="http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation" id="Role_DocumentDocumentAndEntityInformation">
        <link:definition>100000 - Document - Document And Entity Information</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>4
<FILENAME>onto-20191111_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii" standalone="yes"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2019-11-12T22:36:39.6981007+00:00 -->
<!-- Version            : 5.0.0.208 -->
<!-- Package ID         : e348f7368b2844c0890e0ef4badcf432 -->
<!-- Copyright (c) 2019 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://fasb.org/us-gaap/role/label/axisDefault" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-roles-2019-01-31.xsd#axisDefault" xlink:type="simple" />
  <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:type="extended">
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityCentralIndexKey" xlink:type="locator" xlink:label="dei_EntityCentralIndexKey" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Central Index Key</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_CoverAbstract" xlink:type="locator" xlink:label="dei_CoverAbstract" />
    <link:label xml:lang="en-US" xlink:label="dei_CoverAbstract_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Cover [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_DocumentType" xlink:type="locator" xlink:label="dei_DocumentType" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentType_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Type</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentType_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Document Type</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_AmendmentFlag" xlink:type="locator" xlink:label="dei_AmendmentFlag" />
    <link:label xml:lang="en-US" xlink:label="dei_AmendmentFlag_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amendment Flag</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_AmendmentFlag_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Flag</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_DocumentPeriodEndDate" xlink:type="locator" xlink:label="dei_DocumentPeriodEndDate" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Period End Date</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Document Period End Date</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityRegistrantName" xlink:type="locator" xlink:label="dei_EntityRegistrantName" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityRegistrantName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Registrant Name</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityRegistrantName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Registrant Name</link:label>
    <link:label xml:lang="en-US" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Central Index Key</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityEmergingGrowthCompany" xlink:type="locator" xlink:label="dei_EntityEmergingGrowthCompany" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Emerging Growth Company</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Emerging Growth Company</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityFileNumber" xlink:type="locator" xlink:label="dei_EntityFileNumber" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityFileNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity File Number</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityFileNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity File Number</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityIncorporationStateCountryCode" xlink:type="locator" xlink:label="dei_EntityIncorporationStateCountryCode" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Incorporation, State or Country Code</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Incorporation State Country Code</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityTaxIdentificationNumber" xlink:type="locator" xlink:label="dei_EntityTaxIdentificationNumber" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Tax Identification Number</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Tax Identification Number</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressAddressLine1" xlink:type="locator" xlink:label="dei_EntityAddressAddressLine1" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Address Line One</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address Address Line1</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressCityOrTown" xlink:type="locator" xlink:label="dei_EntityAddressCityOrTown" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, City or Town</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address City Or Town</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressStateOrProvince" xlink:type="locator" xlink:label="dei_EntityAddressStateOrProvince" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, State or Province</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address State Or Province</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressPostalZipCode" xlink:type="locator" xlink:label="dei_EntityAddressPostalZipCode" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Postal Zip Code</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address Postal Zip Code</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_CityAreaCode" xlink:type="locator" xlink:label="dei_CityAreaCode" />
    <link:label xml:lang="en-US" xlink:label="dei_CityAreaCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">City Area Code</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_CityAreaCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">City Area Code</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_LocalPhoneNumber" xlink:type="locator" xlink:label="dei_LocalPhoneNumber" />
    <link:label xml:lang="en-US" xlink:label="dei_LocalPhoneNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Local Phone Number</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_LocalPhoneNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Local Phone Number</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_WrittenCommunications" xlink:type="locator" xlink:label="dei_WrittenCommunications" />
    <link:label xml:lang="en-US" xlink:label="dei_WrittenCommunications_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Written Communications</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_WrittenCommunications" xlink:to="dei_WrittenCommunications_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_WrittenCommunications_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Written Communications</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_SolicitingMaterial" xlink:type="locator" xlink:label="dei_SolicitingMaterial" />
    <link:label xml:lang="en-US" xlink:label="dei_SolicitingMaterial_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Soliciting Material</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SolicitingMaterial" xlink:to="dei_SolicitingMaterial_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_SolicitingMaterial_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Soliciting Material</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_PreCommencementTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementTenderOffer" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Pre-commencement Tender Offer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementTenderOffer" xlink:to="dei_PreCommencementTenderOffer_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Pre Commencement Tender Offer</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_PreCommencementIssuerTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementIssuerTenderOffer" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Pre-commencement Issuer Tender Offer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementIssuerTenderOffer" xlink:to="dei_PreCommencementIssuerTenderOffer_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Pre Commencement Issuer Tender Offer</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_Security12bTitle" xlink:type="locator" xlink:label="dei_Security12bTitle" />
    <link:label xml:lang="en-US" xlink:label="dei_Security12bTitle_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Title of 12(b) Security</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_Security12bTitle_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Security12b Title</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_TradingSymbol" xlink:type="locator" xlink:label="dei_TradingSymbol" />
    <link:label xml:lang="en-US" xlink:label="dei_TradingSymbol_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Trading Symbol</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_TradingSymbol_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Trading Symbol</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_SecurityExchangeName" xlink:type="locator" xlink:label="dei_SecurityExchangeName" />
    <link:label xml:lang="en-US" xlink:label="dei_SecurityExchangeName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Security Exchange Name</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_SecurityExchangeName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Security Exchange Name</link:label>
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>5
<FILENAME>onto-20191111_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii" standalone="yes"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2019-11-12T22:36:39.6981007+00:00 -->
<!-- Version            : 5.0.0.208 -->
<!-- Package ID         : e348f7368b2844c0890e0ef4badcf432 -->
<!-- Copyright (c) 2019 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.ontoinnovation.com/20191111/role/TemplateLink" xlink:href="onto-20191111.xsd#TemplateLink" xlink:type="simple" />
  <link:roleRef roleURI="http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation" xlink:href="onto-20191111.xsd#Role_DocumentDocumentAndEntityInformation" xlink:type="simple" />
  <link:presentationLink xlink:type="extended" xlink:role="http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation">
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_SecurityExchangeName" xlink:type="locator" xlink:label="dei_SecurityExchangeName" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_TradingSymbol" xlink:type="locator" xlink:label="dei_TradingSymbol" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_Security12bTitle" xlink:type="locator" xlink:label="dei_Security12bTitle" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_PreCommencementIssuerTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementIssuerTenderOffer" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_PreCommencementTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementTenderOffer" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_SolicitingMaterial" xlink:type="locator" xlink:label="dei_SolicitingMaterial" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_WrittenCommunications" xlink:type="locator" xlink:label="dei_WrittenCommunications" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_LocalPhoneNumber" xlink:type="locator" xlink:label="dei_LocalPhoneNumber" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_CityAreaCode" xlink:type="locator" xlink:label="dei_CityAreaCode" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressPostalZipCode" xlink:type="locator" xlink:label="dei_EntityAddressPostalZipCode" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressStateOrProvince" xlink:type="locator" xlink:label="dei_EntityAddressStateOrProvince" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressCityOrTown" xlink:type="locator" xlink:label="dei_EntityAddressCityOrTown" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityAddressAddressLine1" xlink:type="locator" xlink:label="dei_EntityAddressAddressLine1" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityTaxIdentificationNumber" xlink:type="locator" xlink:label="dei_EntityTaxIdentificationNumber" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityIncorporationStateCountryCode" xlink:type="locator" xlink:label="dei_EntityIncorporationStateCountryCode" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityFileNumber" xlink:type="locator" xlink:label="dei_EntityFileNumber" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityEmergingGrowthCompany" xlink:type="locator" xlink:label="dei_EntityEmergingGrowthCompany" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityCentralIndexKey" xlink:type="locator" xlink:label="dei_EntityCentralIndexKey" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityRegistrantName" xlink:type="locator" xlink:label="dei_EntityRegistrantName" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_DocumentPeriodEndDate" xlink:type="locator" xlink:label="dei_DocumentPeriodEndDate" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_AmendmentFlag" xlink:type="locator" xlink:label="dei_AmendmentFlag" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_DocumentType" xlink:type="locator" xlink:label="dei_DocumentType" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_CoverAbstract" xlink:type="locator" xlink:label="dei_CoverAbstract" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType" order="10010.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag" order="10030.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate" order="10050.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName" order="10070.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey" order="10090.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany" order="10110.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber" order="10130.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode" order="10150.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber" order="10170.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1" order="10190.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown" order="10210.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince" order="10230.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode" order="10250.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode" order="10270.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber" order="10290.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_WrittenCommunications" order="10310.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SolicitingMaterial" order="10330.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementTenderOffer" order="10350.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementIssuerTenderOffer" order="10370.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle" order="10390.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol" order="10410.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName" order="10430.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </link:presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>7
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>8
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "instance": {
  "onto-8k_20191111.htm": {
   "axisCustom": 0,
   "axisStandard": 0,
   "contextCount": 1,
   "dts": {
    "definitionLink": {
     "remote": [
      "http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-eedm-def-2019-01-31.xml",
      "http://xbrl.fasb.org/srt/2019/elts/srt-eedm1-def-2019-01-31.xml"
     ]
    },
    "inline": {
     "local": [
      "onto-8k_20191111.htm"
     ]
    },
    "labelLink": {
     "local": [
      "onto-20191111_lab.xml"
     ],
     "remote": [
      "https://xbrl.sec.gov/dei/2019/dei-doc-2019-01-31.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "onto-20191111_pre.xml"
     ]
    },
    "referenceLink": {
     "remote": [
      "https://xbrl.sec.gov/dei/2019/dei-ref-2019-01-31.xml"
     ]
    },
    "schema": {
     "local": [
      "onto-20191111.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "https://xbrl.sec.gov/country/2017/country-2017-01-31.xsd",
      "http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd",
      "https://xbrl.sec.gov/currency/2019/currency-2019-01-31.xsd",
      "https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd",
      "http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd",
      "https://xbrl.sec.gov/exch/2019/exch-2019-01-31.xsd",
      "https://xbrl.sec.gov/invest/2013/invest-2013-01-31.xsd",
      "http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd",
      "https://xbrl.sec.gov/naics/2017/naics-2017-01-31.xsd",
      "https://xbrl.sec.gov/sic/2011/sic-2011-01-31.xsd",
      "http://xbrl.fasb.org/srt/2019/elts/srt-2019-01-31.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://xbrl.fasb.org/srt/2019/elts/srt-types-2019-01-31.xsd",
      "http://xbrl.fasb.org/srt/2019/elts/srt-roles-2019-01-31.xsd",
      "https://xbrl.sec.gov/stpr/2018/stpr-2018-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2019/elts/us-roles-2019-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2019/elts/us-types-2019-01-31.xsd",
      "http://www.xbrl.org/lrr/role/deprecated-2009-12-16.xsd"
     ]
    }
   },
   "elementCount": 23,
   "entityCount": 1,
   "hidden": {
    "http://xbrl.sec.gov/dei/2019-01-31": 2,
    "total": 2
   },
   "keyCustom": 0,
   "keyStandard": 97,
   "memberCustom": 0,
   "memberStandard": 0,
   "nsprefix": "onto",
   "nsuri": "http://www.ontoinnovation.com/20191111",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "body",
       "html"
      ],
      "baseRef": "onto-8k_20191111.htm",
      "contextRef": "C_0000704532_20191111_20191111",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "100000 - Document - Document And Entity Information",
     "role": "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation",
     "shortName": "Document And Entity Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "body",
       "html"
      ],
      "baseRef": "onto-8k_20191111.htm",
      "contextRef": "C_0000704532_20191111_20191111",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 0,
   "tag": {
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag",
        "terseLabel": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code",
        "terseLabel": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Cover page.",
        "label": "Cover [Abstract]"
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "xbrltype": "stringItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is CCYY-MM-DD.",
        "label": "Document Period End Date",
        "terseLabel": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type",
        "terseLabel": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address Address Line1",
        "terseLabel": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address City Or Town",
        "terseLabel": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address Postal Zip Code",
        "terseLabel": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address State Or Province",
        "terseLabel": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key",
        "terseLabel": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company",
        "terseLabel": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Entity File Number",
        "terseLabel": "Entity File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation State Country Code",
        "terseLabel": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name",
        "terseLabel": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number",
        "terseLabel": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number",
        "terseLabel": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_PreCommencementIssuerTenderOffer": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.",
        "label": "Pre Commencement Issuer Tender Offer",
        "terseLabel": "Pre-commencement Issuer Tender Offer"
       }
      }
     },
     "localname": "PreCommencementIssuerTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_PreCommencementTenderOffer": {
     "auth_ref": [
      "r3"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.",
        "label": "Pre Commencement Tender Offer",
        "terseLabel": "Pre-commencement Tender Offer"
       }
      }
     },
     "localname": "PreCommencementTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r0"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Security12b Title",
        "terseLabel": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name",
        "terseLabel": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_SolicitingMaterial": {
     "auth_ref": [
      "r4"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.",
        "label": "Soliciting Material",
        "terseLabel": "Soliciting Material"
       }
      }
     },
     "localname": "SolicitingMaterial",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol",
        "terseLabel": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "dei_WrittenCommunications": {
     "auth_ref": [
      "r6"
     ],
     "lang": {
      "en-US": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.",
        "label": "Written Communications",
        "terseLabel": "Written Communications"
       }
      }
     },
     "localname": "WrittenCommunications",
     "nsuri": "http://xbrl.sec.gov/dei/2019-01-31",
     "presentation": [
      "http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    }
   },
   "unitCount": 0
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b"
  },
  "r1": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1"
  },
  "r2": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13e",
   "Subsection": "4c"
  },
  "r3": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14d",
   "Subsection": "2b"
  },
  "r4": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14a",
   "Subsection": "12"
  },
  "r5": {
   "Name": "Regulation 12B",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2"
  },
  "r6": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "425"
  }
 },
 "version": "2.1"
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>9
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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MMWF\81AU8\K(XK%T-8943OTJDH\ Q:X831F:3LTXXFBD(3^ G/,6+V2?$9/
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M/_QNPLX;>[#_V/@J*%OX=1?R"U!+ P04    " #.E&Q/F5R<(Q &  "<)P
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M"B]-\K!EG3>*G.[V9ZC%H-[.!?>_1/$#4$L#!!0    ( ,Z4;$\P_^1R1 $
M #P"   /    >&PO=V]R:V)O;VLN>&ULC5'+3L,P$/P5RQ] T@HJ435(B/*H
MA*"BJ'<GV32K^A'9FQ;Z]:P=A98;)WMGQ[.SX\71^7WIW%Y\&6U#(5NB;IYE
MH6K!J'#E.K#<:9PWBKCTNRQT'E0=6@ R.IOF^2PS"JV\6XQ::Y]=%HZ@(G26
MP0AL$8[AW(^E4$PXP*<J"YE+H7IR3Z@)_%(1/'O7=VAWA9Q(T: /M(FS$].@
M18,GJ%,56G=\<1Y/SI+2F\H[K=.KV$B/>$+X1;;@":L_1%+EAV*OA9SE+'C
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M;V-0<F]P<R]A<' N>&UL4$L! A0#%     @ SI1L3P+28?+N    *P(  !$
M             ( !F0$  &1O8U!R;W!S+V-O<F4N>&UL4$L! A0#%     @
MSI1L3YE<G",0!@  G"<  !,              ( !M@(  'AL+W1H96UE+W1H
M96UE,2YX;6Q02P$"% ,4    " #.E&Q/>M'RBZ$"  "3"P  &
M    @ 'W"   >&PO=V]R:W-H965T<R]S:&5E=#$N>&UL4$L! A0#%     @
MSI1L3QT2Y]=O @  % 8  !0              ( !S@L  'AL+W-H87)E9%-T
M<FEN9W,N>&UL4$L! A0#%     @ SI1L3[JA.8K7 0  ,@8   T
M     ( !;PX  'AL+W-T>6QE<RYX;6Q02P$"% ,4    " #.E&Q/,/_D<D0!
M   \ @  #P              @ %Q$   >&PO=V]R:V)O;VLN>&UL4$L! A0#
M%     @ SI1L3__ )@B]    A0(  !H              ( !XA$  'AL+U]R
M96QS+W=O<FMB;V]K+GAM;"YR96QS4$L! A0#%     @ SI1L3PN/V ,A 0
M5P0  !,              ( !UQ(  %M#;VYT96YT7U1Y<&5S72YX;6Q02P4&
2      H "@"  @  *10

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>10
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>11
<FILENAME>0001564590-19-043053-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001564590-19-043053-xbrl.zip
M4$L#!!0    ( ,Z4;$]Y.& JT 0  )87   1    ;VYT;RTR,#$Y,3$Q,2YX
M<V2]6%MOVS84?A^P_\#IJ<6JFYV+;20ILKD! KA9X61#WPJ:HARB%*61E&/_
M^Y&4*,FV[%I*.N4A%,^%W^&YZ!Q??5PG%*PP%R1EUT[H!0[ #*418<MK)Q<N
M%(@0Y^/-K[]<_>:Z8'IW_P!ND20K/"4"T53D'+][_/P>?/UC/@./Z!DG$$Q3
ME">82>""9RFSB>^_O+QX44R82&DNU5'"0VGB ]>UBO_D&&H"F$*)@7DF8!"$
M8S<,W7#P-!A,AA>3X=B[&(_"(+C\/0@F0=!0\$]A V@\$W#N!>IO$(P:C%\@
M^@Z7&-Q/&XQX>#:*+X<7H\5@=':&@M$XP &.SQ8P0O'9<-!$FF8;3I;/$KQ#
M[PU$92]CF%*\ 7>$088(I.#16OH!W#/D@5M*P5R+"3#' O,5CKQ2ZUI$$U'<
MG/(&$Q.F].7)M=.XO/6"4R_E2S^2W)>;#/N*R55<F!/D6+D?"VT+"((J <,L
M,/*6Z<I7!%^9%KI!Z [#BEUF_ "_HFB!T;8 @P2)=@E#TB*7VR*$K;"0[3(%
M30L-=X!QZ6K[ZK-B*!;&](KDFVC:$M/*HYVSM,P@",[]@FA94R;3K;O5&X2Q
M=&7"UH2S/B!43P-5*YX6)"K3EA!F^^PEH44DPJ3]EA3A@*VD/3J4N4-UMT*J
MT,66'Z4YDWS3?D1);'$?)>S[D5,T>0%%=<IZC_]E:+C#\7CL&VH%*.=<E:9#
MB$IJ^]T>B U+:1'":_3<?I*F; E *3E9Y!+?I3R9XACF5/D]9__FD)*8X$B5
M5(IU/=QB:) EY$LL'V""1081[AIGJGZT7:&Z\-#_^GE6%&5'51H 3*TA299R
M"8J2,TN1T7S$:?K-M?'AZBU5D97IGE+F -8*^U!P^:^$80.H%XPZ^GK#L'5!
MGW]^Z.3V0G+:F>)8KMD7MTZ\HQB.Y6M?.,U$J][<.B%. ]26KCT1V7JG%UUQ
M[-;*?G'1_"8_%%]8'1]C'9_AQ4GQV?Y9?RV<UV+IAF//,U6I-*NNOMDKM#U1
M-+J&<NW6'<1)2%KZCGZ>H9S[D".>4JR^0DA^6F<4,BA3D]*=G*39MW2YN%9V
MI]Y?@]$H97BI>O&H%["F@C< (E\#HG_IK7O48MFU[.[WN#V!V'9<+]RZ+S\)
MQ&XK?[(SC):]OM7'5 K35?\XG0\VO6^&0;M8=$12"/T</*:=[(IGOP?M&R9V
M"C,KMY['3@N4W1FNYZTT1Y;B9LJ=+O?2-O>\)9[.@6-E?AJBSJ'3.KTT$$$U
M-4@#P^S9W2PC+$[++;6IF^*)-NU)*0-$C1)/.%%?$HEG9OK2I+_G]Z<.)475
MW5;1;32LH%EP$8X)(\:00#_ ;?["9(\"^JPK?U=B5UDN</07NS'KC&.AE!@C
M&M(ERS%)!"G*:0_!&MEAN7+7^F3'5?:>YC@&9D">E%W \3':SWB:82Z)"IC&
M%&X4/',<7SO:J:YUXS<*%Y[RFV79.V#;><;I2@3360W/RDHBM?!,DXV7Q <
M::5:!_&U(U0"T6HR^]_-5:'0U=S=Z&FW^DN#J[/Q55IV34()URE+DTV!U&:+
M_7_+HD],X=O<JTK $R/OF-2?*_9O)[$?R]*P)4VKI=(&"G6@H:];XO9.O_X9
MWS]QK_S=NEON-.MSL55\/6[^ U!+ P04    " #.E&Q/NB)V1@T'  "(20
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M^E="=UL,!ERJC7]4BD3+QCQBGT&?_960?'Y]0\X&0U],@*-G=1&Y$.6=%PX
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M#+IB_:&P*]9?)?\'4$L! A0#%     @ SI1L3WDX8"K0!   EA<  !$
M         ( !     &]N=&\M,C Q.3$Q,3$N>'-D4$L! A0#%     @ SI1L
M3[HB=D8-!P  B$D  !4              ( !_P0  &]N=&\M,C Q.3$Q,3%?
M;&%B+GAM;%!+ 0(4 Q0    ( ,Z4;$]1+B$>^00  .XK   5
M  "  3\,  !O;G1O+3(P,3DQ,3$Q7W!R92YX;6Q02P$"% ,4    " #.E&Q/
MZ[]?IE85  #9A@  %               @ %K$0  ;VYT;RTX:U\R,#$Y,3$Q
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L@ 'S)@  ;VYT;RUE>#$V,5\V+FAT;5!+!08     !0 % $4!  !I*@     !

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>12
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.19.3</span><table class="report" border="0" cellspacing="2" id="idp6629585792">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Document And Entity Information<br></strong></div></th>
<th class="th"><div>Nov. 11, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Cover [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">8-K<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Nov. 11,  2019<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">

ONTO INNOVATION INC.
<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000704532<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">001-39110<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">DE<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">94-2276314<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">16 Jonspin Road<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Wilmington<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">MA<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">01887<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">978<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">253-6200<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_WrittenCommunications', window );">Written Communications</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_SolicitingMaterial', window );">Soliciting Material</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_PreCommencementTenderOffer', window );">Pre-commencement Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_PreCommencementIssuerTenderOffer', window );">Pre-commencement Issuer Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock, $0.001 par value per share<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ONTO<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NYSE<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is CCYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementIssuerTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 13e<br> -Subsection 4c<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementIssuerTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 14d<br> -Subsection 2b<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SolicitingMaterial">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Section 14a<br> -Number 240<br> -Subsection 12<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SolicitingMaterial</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_WrittenCommunications">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 425<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_WrittenCommunications</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>13
<FILENAME>onto-8k_20191111_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:dei="http://xbrl.sec.gov/dei/2019-01-31"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:xlink="http://www.w3.org/1999/xlink">
    <link:schemaRef xlink:href="onto-20191111.xsd" xlink:type="simple"/>
    <context id="C_0000704532_20191111_20191111">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000704532</identifier>
        </entity>
        <period>
            <startDate>2019-11-11</startDate>
            <endDate>2019-11-11</endDate>
        </period>
    </context>
    <dei:AmendmentFlag contextRef="C_0000704532_20191111_20191111" id="F_000001">false</dei:AmendmentFlag>
    <dei:EntityCentralIndexKey contextRef="C_0000704532_20191111_20191111" id="F_000004">0000704532</dei:EntityCentralIndexKey>
    <dei:DocumentType contextRef="C_0000704532_20191111_20191111" id="F_000000">8-K</dei:DocumentType>
    <dei:DocumentPeriodEndDate contextRef="C_0000704532_20191111_20191111" id="F_000002">2019-11-11</dei:DocumentPeriodEndDate>
    <dei:EntityRegistrantName contextRef="C_0000704532_20191111_20191111" id="F_000003">  ONTO INNOVATION INC. </dei:EntityRegistrantName>
    <dei:EntityIncorporationStateCountryCode contextRef="C_0000704532_20191111_20191111" id="F_000007">DE</dei:EntityIncorporationStateCountryCode>
    <dei:EntityFileNumber contextRef="C_0000704532_20191111_20191111" id="F_000006">001-39110</dei:EntityFileNumber>
    <dei:EntityTaxIdentificationNumber contextRef="C_0000704532_20191111_20191111" id="F_000008">94-2276314</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1 contextRef="C_0000704532_20191111_20191111" id="F_000009">16 Jonspin Road</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown contextRef="C_0000704532_20191111_20191111" id="F_000010">Wilmington</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince contextRef="C_0000704532_20191111_20191111" id="F_000011">MA</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode contextRef="C_0000704532_20191111_20191111" id="F_000012">01887</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode contextRef="C_0000704532_20191111_20191111" id="F_000013">978</dei:CityAreaCode>
    <dei:LocalPhoneNumber contextRef="C_0000704532_20191111_20191111" id="F_000014">253-6200</dei:LocalPhoneNumber>
    <dei:WrittenCommunications contextRef="C_0000704532_20191111_20191111" id="F_000015">false</dei:WrittenCommunications>
    <dei:SolicitingMaterial contextRef="C_0000704532_20191111_20191111" id="F_000016">false</dei:SolicitingMaterial>
    <dei:PreCommencementTenderOffer contextRef="C_0000704532_20191111_20191111" id="F_000017">false</dei:PreCommencementTenderOffer>
    <dei:PreCommencementIssuerTenderOffer contextRef="C_0000704532_20191111_20191111" id="F_000018">false</dei:PreCommencementIssuerTenderOffer>
    <dei:EntityEmergingGrowthCompany contextRef="C_0000704532_20191111_20191111" id="F_000005">false</dei:EntityEmergingGrowthCompany>
    <dei:Security12bTitle contextRef="C_0000704532_20191111_20191111" id="F_000019">Common Stock, $0.001 par value per share</dei:Security12bTitle>
    <dei:TradingSymbol contextRef="C_0000704532_20191111_20191111" id="F_000020">ONTO</dei:TradingSymbol>
    <dei:SecurityExchangeName contextRef="C_0000704532_20191111_20191111" id="F_000021">NYSE</dei:SecurityExchangeName>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.19.3</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>1</ContextCount>
  <ElementCount>97</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>0</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>0</UnitCount>
  <MyReports>
    <Report instance="onto-8k_20191111.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>100000 - Document - Document And Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.ontoinnovation.com/20191111/taxonomy/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document And Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File doctype="8-K" original="onto-8k_20191111.htm">onto-8k_20191111.htm</File>
    <File>onto-20191111.xsd</File>
    <File>onto-20191111_lab.xml</File>
    <File>onto-20191111_pre.xml</File>
    <File>onto-ex161_6.htm</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy>http://xbrl.sec.gov/dei/2019-01-31</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>false</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
