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Share-Based Compensation and Employee Benefit Plans - Textual (Details) - USD ($) shares in Thousands | 9 Months Ended | 12 Months Ended
--- | --- | ---
Sep. 30, 2019 | Dec. 31, 2019 | Dec. 31, 2018 | Dec. 31, 2017
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Total intrinsic value of stock options exercised |  | $ 51,000 | $ 384,000 | $ 853,000
Unrecognized compensation cost - option |  | 0 |  |
Stock based compensation expense |  | $ 10,585,000 | $ 6,062,000 | $ 5,670,000
Shares purchased under ESPP |  | 72 | 13 | 11
Employee stock purchase plan available |  | 236 |  | 1,206
Percentage of contribution for annual compensation |  | 100.00% |  |
Percentage of match of all employee contribution |  | 50.00% |  |
Total matching contribution to plan |  | $ 1,317,000 | $ 1,118,000 | $ 1,047,000
Rudolph 2018 Employee Stock Purchase Plan [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Price of common stock as percentage of fair market value | 95.00% |  |  |
Stock based compensation expense |  | $ 0 | $ 0 | $ 0
Nanometrics 2003 Employee Stock Purchase Plan [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Price of common stock as percentage of fair market value |  | 85.00% |  |
Stock based compensation expense |  | $ 165,000 |  |
Maximum percentage of salary withholdings |  | 10.00% |  |
Maximum [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Percentage of match on employee salary |  | 6.00% |  |
Maximum [Member] | Rudolph 2018 Employee Stock Purchase Plan [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Eligible compensation deduction percentage on pay for purchase of common stock | 15.00% |  |  |
Restricted Stock Units (RSUs) [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Total unrecognized compensation cost related to restricted stock units granted |  | $ 22,230,000 |  |
Unrecognized compensation cost related to restricted stock units, weighted average period |  | 1 year 10 months 24 days |  |
Rudolph 2018 Stock Plan [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Share authorized available for grants |  | 2,709 |  |
Shares of common stock available for issuance pursuant to future grants |  | 2,478 | 2,680 |
Rudolph 2018 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Employees [Member] | Minimum [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 3 years |  |
Rudolph 2018 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Employees [Member] | Maximum [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 5 years |  |
Rudolph 2018 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Directors [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 1 year |  |
Rudolph 2018 Stock Plan [Member] | Stock Options [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 5 years |  |
Options expiration period |  | 10 years |  |
Rudolph 2009 Stock Plan [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Share authorized available for grants |  | 4,711 |  |
Shares of common stock available for issuance pursuant to future grants |  | 0 | 0 |
Rudolph 2009 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Employees [Member] | Minimum [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 3 years |  |
Rudolph 2009 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Employees [Member] | Maximum [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 5 years |  |
Rudolph 2009 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Directors [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 1 year |  |
Rudolph 2009 Stock Plan [Member] | Stock Options [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 5 years |  |
Options expiration period |  | 10 years |  |
Nanometrics 2005 Equity Incentive Plan [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Share authorized available for grants |  | 4,714 |  |
Shares of common stock available for issuance pursuant to future grants |  | 1,253 |  |
Nanometrics 2005 Equity Incentive Plan [Member] | Restricted Stock Units (RSUs) [Member] | Employees [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 3 years |  |
Nanometrics 2005 Equity Incentive Plan [Member] | Restricted Stock Units (RSUs) [Member] | Directors [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 1 year |  |
Nanometrics 2005 Equity Incentive Plan [Member] | Stock Options [Member] |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |
Period of vesting |  | 3 years |  |
Options expiration period |  | 10 years |  |

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