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Business Combination - Preliminary Allocation of the Intangible Assets (Details) - Rudolph Technologies, Inc. [Member] - USD ($) $ in Thousands | 12 Months Ended |
--- | --- | ---
Dec. 31, 2019 | Oct. 25, 2019
Business Acquisition [Line Items] |  |
Estimated Fair Value | $ 374,900 | $ 374,900
In-process research and development [Member] |  |
Business Acquisition [Line Items] |  |
Estimated Fair Value | $ 46,600 |
Weighted Average Useful Life (years) | indefinite |
Developed technology [Member] |  |
Business Acquisition [Line Items] |  |
Estimated Fair Value | $ 260,500 |
Weighted Average Useful Life (years) | 6 years 7 months 6 days |
Customer relationships [Member] |  |
Business Acquisition [Line Items] |  |
Estimated Fair Value | $ 53,000 |
Weighted Average Useful Life (years) | 13 years 1 month 6 days |
Backlog [Member] |  |
Business Acquisition [Line Items] |  |
Estimated Fair Value | $ 6,700 |
Weighted Average Useful Life (years) | 1 year 1 month 6 days |
Trademarks and trade names [Member] |  |
Business Acquisition [Line Items] |  |
Estimated Fair Value | $ 8,100 |
Weighted Average Useful Life (years) | 7 years 6 months |

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- Definition Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (a)(3) -URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275 + Details
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- Definition Amount of intangible assets, excluding goodwill, acquired at the acquisition date. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=116869197&loc=d3e4845-128472 + Details
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