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Business Combination - Textual (Details) $ / shares in Units, shares in Thousands, $ in Thousands |  | 3 Months Ended | 12 Months Ended
--- | --- | --- | ---
Oct. 25, 2019 $ / shares | Dec. 31, 2019 USD ($) $ / shares | Sep. 30, 2019 USD ($) | Jun. 30, 2019 USD ($) | Mar. 31, 2019 USD ($) | Dec. 31, 2018 USD ($) $ / shares | Sep. 30, 2018 USD ($) | Jun. 30, 2018 USD ($) | Mar. 31, 2018 USD ($) | Dec. 31, 2019 USD ($) $ / shares shares | Dec. 31, 2018 USD ($) $ / shares | Dec. 31, 2017 USD ($)
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Common stock, par value | $ / shares |  | $ 0.001 |  |  |  | $ 0.001 |  |  |  | $ 0.001 | $ 0.001 |
Net sales |  | $ 120,558 | $ 62,935 | $ 61,511 | $ 60,892 | $ 62,780 | $ 60,432 | $ 77,476 | $ 73,096 | $ 305,896 | $ 273,784 | $ 255,098
Operating loss |  |  |  |  |  |  |  |  |  | 5,043 | $ (51,084) | (59,288)
Rudolph Technologies, Inc. [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Common stock, par value | $ / shares | $ 0.001 |  |  |  |  |  |  |  |  |  |  |
Common stock conversion ratio | 0.8042 |  |  |  |  |  |  |  |  |  |  |
Business acquisition, related costs |  |  |  |  |  |  |  |  |  |  |  | $ 37,900
Business combination aggregate purchase price |  |  |  |  |  |  |  |  |  | 890,131 |  |
Account receivable not expected to be collected |  | 200 |  |  |  |  |  |  |  | 200 |  |
Step-up of inventory to fair value as of merger date |  |  |  |  |  |  |  |  |  | 26,486 |  |
Net sales |  |  |  |  |  |  |  |  |  | 66,261 |  |
Operating loss |  |  |  |  |  |  |  |  |  | $ 7,065 |  |
Rudolph Technologies, Inc. [Member] | Developed technology [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Estimated useful life |  |  |  |  |  |  |  |  |  | 6 years 7 months 6 days |  |
Rudolph Technologies, Inc. [Member] | Customer relationships [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Estimated useful life |  |  |  |  |  |  |  |  |  | 13 years 1 month 6 days |  |
Rudolph Technologies, Inc. [Member] | Backlog [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Estimated useful life |  |  |  |  |  |  |  |  |  | 1 year 1 month 6 days |  |
Rudolph Technologies, Inc. [Member] | Trademarks and trade names [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Estimated useful life |  |  |  |  |  |  |  |  |  | 7 years 6 months |  |
Rudolph Technologies, Inc. [Member] | Nanometrics Equity Awards [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Business combination fair value of assumed equity awards included in aggregate purchase |  |  |  |  |  |  |  |  |  | $ 5,330 |  |
Rudolph Technologies, Inc. [Member] | General and Administrative Expense [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Business acquisition, related costs |  | 9,907 |  |  |  |  |  |  |  | 9,907 |  |
Rudolph Technologies, Inc. [Member] | Common Stock [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Closing price of shares | $ / shares | $ 28.50 |  |  |  |  |  |  |  |  |  |  |
Business combination equity interests issued or issuable |  | $ 884,801 |  |  |  |  |  |  |  | $ 884,801 |  |
Business combination common stock shares issued | shares |  |  |  |  |  |  |  |  |  | 25,060 |  |
Rudolph Technologies, Inc. [Member] | Combined Entity [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Ownership percentage | 50.00% |  |  |  |  |  |  |  |  |  |  |
Parent Company [Member] | Combined Entity [Member] |  |  |  |  |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |  |  |  |  |
Ownership percentage | 50.00% |  |  |  |  |  |  |  |  |  |  |

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