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Business Combination - Summary of Preliminary Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) - USD ($) $ in Thousands | Mar. 28, 2020 | Dec. 31, 2019 | Oct. 25, 2019
--- | --- | --- | ---
Business Acquisition [Line Items] |  |  |
Goodwill | $ 307,626 | $ 307,148 |
Rudolph Technologies, Inc. [Member] |  |  |
Business Acquisition [Line Items] |  |  |
Cash and cash equivalents |  |  | $ 43,882
Marketable securities |  |  | 94,389
Account receivables |  |  | 49,917
Inventories |  |  | 98,478
Prepaid expenses and other current assets |  |  | 7,734
Property, plant and equipment |  |  | 77,451
Operating lease right-of-use assets |  |  | 9,658
Identifiable intangible assets |  |  | 374,900
Deferred income taxes |  |  | 1,352
Other assets |  |  | 850
Total assets acquired |  |  | 758,611
Accounts payable |  |  | (23,361)
Payroll and related expenses |  |  | (20,290)
Deferred revenue |  |  | (5,931)
Other current liabilities |  |  | (10,739)
Income taxes payable |  |  | (2,699)
Other non-current liabilities |  |  | (90,591)
Net assets acquired |  |  | 605,000
Goodwill |  |  | 285,131
Total purchase consideration |  |  | $ 890,131

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