<SEC-DOCUMENT>0001564590-20-015300-index.html : 20200403
<SEC-HEADER>0001564590-20-015300.hdr.sgml : 20200403
<ACCEPTANCE-DATETIME>20200403171147
ACCESSION NUMBER:		0001564590-20-015300
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		16
CONFORMED PERIOD OF REPORT:	20200512
FILED AS OF DATE:		20200403
DATE AS OF CHANGE:		20200403
EFFECTIVENESS DATE:		20200403

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		20774515

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>onto-def14a_20200512.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: onto-def14a_20200512.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g3vrwfom4czk000007.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: g3vrwfom4czk000007.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g3vrwfom4czk000006.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g3vrwfom4czk000006.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>g3vrwfom4czk000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: g3vrwfom4czk000001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g3vrwfom4czk000013.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: g3vrwfom4czk000013.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g3vrwfom4czk000015.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g3vrwfom4czk000015.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g3vrwfom4czk000014.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: g3vrwfom4czk000014.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g3vrwfom4czk000004.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: g3vrwfom4czk000004.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g3vrwfom4czk000003.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: g3vrwfom4czk000003.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>g3vrwfom4czk000012.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: g3vrwfom4czk000012.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>g3vrwfom4czk000010.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: g3vrwfom4czk000010.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>g3vrwfom4czk000005.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: g3vrwfom4czk000005.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>g3vrwfom4czk000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: g3vrwfom4czk000002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>g3vrwfom4czk000011.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: g3vrwfom4czk000011.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>15
<FILENAME>g3vrwfom4czk000008.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 15 - file: g3vrwfom4czk000008.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>16
<FILENAME>g3vrwfom4czk000009.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 16 - file: g3vrwfom4czk000009.jpg

</DOCUMENT>
</SEC-DOCUMENT>