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Business Combination - Summary of Final Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) - USD ($)
$ in Thousands
Dec. 26, 2020
Dec. 31, 2019
Oct. 25, 2019
Dec. 31, 2018
Business Acquisition [Line Items]        
Goodwill $ 306,632 $ 307,148   $ 22,495
Rudolph Technologies, Inc. [Member]        
Business Acquisition [Line Items]        
Cash and cash equivalents     $ 43,882  
Marketable securities     94,389  
Account receivables     49,917  
Inventories     98,478  
Prepaid expenses and other current assets     6,659  
Property, plant and equipment     77,451  
Operating lease right-of-use assets     9,658  
Identifiable intangible assets $ 374,900   374,900  
Deferred income taxes     2,191  
Other assets     850  
Total assets acquired     758,375  
Accounts payable     (23,361)  
Payroll and related expenses     (20,290)  
Deferred revenue     (5,931)  
Other current liabilities     (10,679)  
Income taxes payable     (2,007)  
Other non-current liabilities     (90,113)  
Net assets acquired     605,994  
Goodwill     284,137  
Total purchase consideration     $ 890,131