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Business Combination - Schedule of Pro Forma and Reported Financial Information (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 26, 2020	Dec. 31, 2019	Dec. 31, 2018
Business Acquisition [Line Items]
Revenue	$ 556,496	$ 305,896	$ 273,784
Net income attributable to Onto Innovation Reported	$ 31,025	1,910	45,096
Rudolph Technologies, Inc. [Member]
Business Acquisition [Line Items]
Revenue		66,261
Net revenue Pro Forma		525,455	598,307
Net income attributable to Onto Innovation Pro Forma		$ 901	$ 36,246

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