# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-022055
Filing Date
2021-04-29
Accepted
2021-04-29 17:13:45
Documents
89
Period of Report
2021-03-27

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-10q_20210327.htm iXBRL | 10-Q | 2403673
2 | EX-31.1 | onto-ex311_6.htm | EX-31.1 | 38189
3 | EX-31.2 | onto-ex312_9.htm | EX-31.2 | 38084
4 | EX-32.1 | onto-ex321_7.htm | EX-32.1 | 10027
5 | EX-32.2 | onto-ex322_8.htm | EX-32.2 | 10331
| Complete submission text file | 0001564590-21-022055.txt |  | 10220182

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL TAXONOMY EXTENSION SCHEMA | onto-20210327.xsd | EX-101.SCH | 54010
7 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | onto-20210327_cal.xml | EX-101.CAL | 79849
8 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | onto-20210327_def.xml | EX-101.DEF | 130840
9 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | onto-20210327_lab.xml | EX-101.LAB | 405282
10 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | onto-20210327_pre.xml | EX-101.PRE | 310518
11 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-10q_20210327_htm.xml | XML | 2495387

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 21872022
SIC: 3829 Measuring & Controlling Devices, NEC