# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-041715
Filing Date
2021-08-05
Accepted
2021-08-05 17:11:07
Documents
95
Period of Report
2021-06-26

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-10q_20210626.htm iXBRL | 10-Q | 2935447
2 | EX-10.1 | onto-ex101_216.htm | EX-10.1 | 515819
3 | EX-31.1 | onto-ex311_7.htm | EX-31.1 | 47923
4 | EX-31.2 | onto-ex312_6.htm | EX-31.2 | 47818
5 | EX-32.1 | onto-ex321_9.htm | EX-32.1 | 10026
6 | EX-32.2 | onto-ex322_8.htm | EX-32.2 | 10330
7 | GRAPHIC | g1j1klyt12ov000005.jpg | GRAPHIC | 1100
8 | GRAPHIC | g1j1klyt12ov000003.jpg | GRAPHIC | 1093
9 | GRAPHIC | g1j1klyt12ov000002.jpg | GRAPHIC | 6951
10 | GRAPHIC | g1j1klyt12ov000004.jpg | GRAPHIC | 6951
11 | GRAPHIC | g1j1klyt12ov000001.jpg | GRAPHIC | 6951
| Complete submission text file | 0001564590-21-041715.txt |  | 12184605

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
12 | XBRL TAXONOMY EXTENSION SCHEMA | onto-20210626.xsd | EX-101.SCH | 53910
13 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | onto-20210626_cal.xml | EX-101.CAL | 80837
14 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | onto-20210626_def.xml | EX-101.DEF | 130915
15 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | onto-20210626_lab.xml | EX-101.LAB | 405970
16 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | onto-20210626_pre.xml | EX-101.PRE | 311576
17 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-10q_20210626_htm.xml | XML | 2920230

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 211149417
SIC: 3829 Measuring & Controlling Devices, NEC