# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-054563
Filing Date
2021-11-04
Accepted
2021-11-04 17:06:06
Documents
91
Period of Report
2021-09-25

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-10q_20210925.htm iXBRL | 10-Q | 3105519
2 | EX-10.1 | onto-ex101_7.htm | EX-10.1 | 178973
3 | EX-31.1 | onto-ex311_8.htm | EX-31.1 | 47925
4 | EX-31.2 | onto-ex312_10.htm | EX-31.2 | 47822
5 | EX-32.1 | onto-ex321_9.htm | EX-32.1 | 10033
6 | EX-32.2 | onto-ex322_6.htm | EX-32.2 | 10337
7 | GRAPHIC | g430rrwd1kab000001.jpg | GRAPHIC | 6951
| Complete submission text file | 0001564590-21-054563.txt |  | 12063351

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
8 | XBRL TAXONOMY EXTENSION SCHEMA | onto-20210925.xsd | EX-101.SCH | 54484
9 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | onto-20210925_cal.xml | EX-101.CAL | 79103
10 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | onto-20210925_def.xml | EX-101.DEF | 130093
11 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | onto-20210925_lab.xml | EX-101.LAB | 402043
12 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | onto-20210925_pre.xml | EX-101.PRE | 308535
13 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-10q_20210925_htm.xml | XML | 2958958

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 211381041
SIC: 3829 Measuring & Controlling Devices, NEC