<SEC-DOCUMENT>0001407682-21-000120.txt : 20211005
<SEC-HEADER>0001407682-21-000120.hdr.sgml : 20211005
<ACCEPTANCE-DATETIME>20211005161210
ACCESSION NUMBER:		0001407682-21-000120
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20211001
FILED AS OF DATE:		20211005
DATE AS OF CHANGE:		20211005

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Harlow James
		CENTRAL INDEX KEY:			0001886460

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		211306747

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN RD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0206</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2021-10-01</periodOfReport>

    <noSecuritiesOwned>1</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000704532</issuerCik>
        <issuerName>ONTO INNOVATION INC.</issuerName>
        <issuerTradingSymbol>ONTO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001886460</rptOwnerCik>
            <rptOwnerName>Harlow James</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ONTO INNOVATION INC.</rptOwnerStreet1>
            <rptOwnerStreet2>16 JONSPIN ROAD</rptOwnerStreet2>
            <rptOwnerCity>WILMINGTON</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01887</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>1</isOther>
            <otherText>Chief Operating Officer</otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <ownerSignature>
        <signatureName>By: /s/ Robert A. Koch For: James Harlow</signatureName>
        <signatureDate>2021-10-05</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
