<SEC-DOCUMENT>0001564590-21-017201-index.html : 20210401
<SEC-HEADER>0001564590-21-017201.hdr.sgml : 20210401
<ACCEPTANCE-DATETIME>20210401104053
ACCESSION NUMBER:		0001564590-21-017201
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		14
CONFORMED PERIOD OF REPORT:	20210511
FILED AS OF DATE:		20210401
DATE AS OF CHANGE:		20210401

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		21796524

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
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<SEQUENCE>1
<FILENAME>onto-def14a_20210517.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: onto-def14a_20210517.htm

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Document 2 - file: gcngv5dbn2ob000011.jpg

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<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gcngv5dbn2ob000008.jpg

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<TEXT>
Document 4 - file: gcngv5dbn2ob000002.jpg

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Document 5 - file: gcngv5dbn2ob000010.jpg

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<TEXT>
Document 6 - file: gcngv5dbn2ob000007.jpg

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<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: gcngv5dbn2ob000001.jpg

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Document 8 - file: gcngv5dbn2ob000012.jpg

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<TEXT>
Document 9 - file: gcngv5dbn2ob000003.jpg

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<TEXT>
Document 10 - file: gcngv5dbn2ob000004.jpg

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<TEXT>
Document 11 - file: gcngv5dbn2ob000013.jpg

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<TEXT>
Document 12 - file: gcngv5dbn2ob000006.jpg

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<SEQUENCE>13
<FILENAME>gcngv5dbn2ob000005.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: gcngv5dbn2ob000005.jpg

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<TEXT>
Document 14 - file: gcngv5dbn2ob000009.jpg

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