# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-22-017529
Filing Date
2022-05-03
Accepted
2022-05-03 17:17:38
Documents
88
Period of Report
2022-04-02

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-10q_20220402.htm iXBRL | 10-Q | 2362406
2 | EX-10.1 | onto-ex101_90.htm | EX-10.1 | 27177
3 | EX-31.1 | onto-ex311_7.htm | EX-31.1 | 38300
4 | EX-31.2 | onto-ex312_8.htm | EX-31.2 | 38195
5 | EX-32.1 | onto-ex321_9.htm | EX-32.1 | 10223
6 | EX-32.2 | onto-ex322_10.htm | EX-32.2 | 10441
7 | GRAPHIC | gyqjmwpqhscu000001.jpg | GRAPHIC | 59170
8 | GRAPHIC | gyqjmwpqhscu000002.jpg | GRAPHIC | 9539
| Complete submission text file | 0001564590-22-017529.txt |  | 9920344

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
9 | XBRL TAXONOMY EXTENSION SCHEMA | onto-20220402.xsd | EX-101.SCH | 51820
10 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | onto-20220402_cal.xml | EX-101.CAL | 68192
11 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | onto-20220402_def.xml | EX-101.DEF | 122585
12 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | onto-20220402_lab.xml | EX-101.LAB | 378046
13 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | onto-20220402_pre.xml | EX-101.PRE | 292222
82 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-10q_20220402_htm.xml | XML | 2353627

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 22888329
SIC: 3829 Measuring & Controlling Devices, NEC