# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-22-028807
Filing Date
2022-08-09
Accepted
2022-08-09 17:17:02
Documents
86
Period of Report
2022-07-02

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-10q_20220702.htm iXBRL | 10-Q | 2890754
2 | EX-31.1 | onto-ex311_6.htm | EX-31.1 | 38303
3 | EX-31.2 | onto-ex312_8.htm | EX-31.2 | 38172
4 | EX-32.1 | onto-ex321_7.htm | EX-32.1 | 10225
5 | EX-32.2 | onto-ex322_10.htm | EX-32.2 | 10417
| Complete submission text file | 0001564590-22-028807.txt |  | 11198099

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL TAXONOMY EXTENSION SCHEMA | onto-20220702.xsd | EX-101.SCH | 53377
7 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | onto-20220702_cal.xml | EX-101.CAL | 67718
8 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | onto-20220702_def.xml | EX-101.DEF | 121316
9 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | onto-20220702_lab.xml | EX-101.LAB | 379202
10 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | onto-20220702_pre.xml | EX-101.PRE | 291281
80 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-10q_20220702_htm.xml | XML | 2803082

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 221149453
SIC: 3829 Measuring & Controlling Devices, NEC