# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-22-037253
Filing Date
2022-11-10
Accepted
2022-11-09 19:30:17
Documents
87
Period of Report
2022-10-01

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-10q_20221001.htm iXBRL | 10-Q | 3089119
2 | EX-10.1 | onto-ex101_98.htm | EX-10.1 | 145180
3 | EX-31.1 | onto-ex311_7.htm | EX-31.1 | 38305
4 | EX-31.2 | onto-ex312_8.htm | EX-31.2 | 38174
5 | EX-32.1 | onto-ex321_6.htm | EX-32.1 | 10230
6 | EX-32.2 | onto-ex322_9.htm | EX-32.2 | 10420
| Complete submission text file | 0001564590-22-037253.txt |  | 11670708

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA | onto-20221001.xsd | EX-101.SCH | 53625
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | onto-20221001_cal.xml | EX-101.CAL | 69361
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | onto-20221001_def.xml | EX-101.DEF | 124216
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | onto-20221001_lab.xml | EX-101.LAB | 386478
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | onto-20221001_pre.xml | EX-101.PRE | 295097
81 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-10q_20221001_htm.xml | XML | 2840905

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 221374418
SIC: 3829 Measuring & Controlling Devices, NEC