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    ACCESSION NUMBER:		0001564590-22-012779
    CONFORMED SUBMISSION TYPE:	DEF 14A
    PUBLIC DOCUMENT COUNT:		17
    CONFORMED PERIOD OF REPORT:	20220510
    FILED AS OF DATE:		20220331
    DATE AS OF CHANGE:		20220331

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
    		CENTRAL INDEX KEY:			0000704532
    		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
    		IRS NUMBER:				942276314
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1226

    	FILING VALUES:
    		FORM TYPE:		DEF 14A
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	001-39110
    		FILM NUMBER:		22789366

    	BUSINESS ADDRESS:
    		STREET 1:		16 JONSPIN ROAD
    		CITY:			WILMINGTON
    		STATE:			MA
    		ZIP:			01887
    		BUSINESS PHONE:		9782536200

    	MAIL ADDRESS:
    		STREET 1:		16 JONSPIN ROAD
    		CITY:			WILMINGTON
    		STATE:			MA
    		ZIP:			01887

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	Onto Innovation Inc.
    		DATE OF NAME CHANGE:	20191025

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	NANOMETRICS INC
    		DATE OF NAME CHANGE:	19920703
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