# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001564590-22-012779
Filing Date
2022-03-31
Accepted
2022-03-31 09:01:58
Documents
17
Period of Report
2022-05-10

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | onto-def14a_20220510.htm | DEF 14A | 1798552
2 | GRAPHIC | gru4i3iglfgi000001.jpg | GRAPHIC | 20577
3 | GRAPHIC | gru4i3iglfgi000015.jpg | GRAPHIC | 607226
4 | GRAPHIC | gru4i3iglfgi000010.jpg | GRAPHIC | 16586
5 | GRAPHIC | gru4i3iglfgi000011.jpg | GRAPHIC | 137993
6 | GRAPHIC | gru4i3iglfgi000006.jpg | GRAPHIC | 9678
7 | GRAPHIC | gru4i3iglfgi000003.jpg | GRAPHIC | 723047
8 | GRAPHIC | gru4i3iglfgi000007.jpg | GRAPHIC | 15274
9 | GRAPHIC | gru4i3iglfgi000005.jpg | GRAPHIC | 10954
10 | GRAPHIC | gru4i3iglfgi000008.jpg | GRAPHIC | 11389
11 | GRAPHIC | gru4i3iglfgi000016.jpg | GRAPHIC | 313750
12 | GRAPHIC | gru4i3iglfgi000013.jpg | GRAPHIC | 128968
13 | GRAPHIC | gru4i3iglfgi000009.jpg | GRAPHIC | 53739
14 | GRAPHIC | gru4i3iglfgi000002.jpg | GRAPHIC | 20577
15 | GRAPHIC | gru4i3iglfgi000014.jpg | GRAPHIC | 126972
16 | GRAPHIC | gru4i3iglfgi000004.jpg | GRAPHIC | 7751
17 | GRAPHIC | gru4i3iglfgi000012.jpg | GRAPHIC | 116446
| Complete submission text file | 0001564590-22-012779.txt |  | 4997480

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: DEF 14A | Act: 34 | File No.: 001-39110 | Film No.: 22789366
SIC: 3829 Measuring & Controlling Devices, NEC