EX-21 3 onto-ex21_1.htm EX-21.1

Exhibit 21.1

SUBSIDIARIES

Name |  | Jurisdiction
Rudolph Technologies, Inc. |  | U.S.A.
4D Technology Corporation |  | U.S.A.
Inspectrology LLC |  | U.S.A.
Onto Innovation Japan Co. Ltd. |  | Japan
Onto Innovation (Shanghai) Trading Co., Ltd. |  | China
Nanometrics China Company Ltd. |  | China
Onto Innovation Germany GmbH |  | Germany
Onto Innovation Hong Kong Limited |  | Hong Kong
Onto Innovation Europe, B.V. |  | Netherlands
Onto Innovation Switzerland GmBH |  | Switzerland
Nanometrics U.K. Ltd. |  | United Kingdom
Nanometrics Israel, Ltd. |  | Israel
Onto Innovation Korea Ltd. |  | Korea
Onto Innovation Southeast Asia Pte. Limited |  | Singapore
Onto Innovation Ireland Limited |  | Ireland
Onto Innovation Malaysia Sdn. Bhd. |  | Malaysia
Onto Innovation Vietnam PTE Company Limited |  | Vietnam
Neta SAS |  | France