# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-23-004283
Filing Date
2023-02-24
Accepted
2023-02-24 10:52:11
Documents
104
Period of Report
2022-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | onto-20221231.htm iXBRL | 10-K | 4495215
2 | EX-10.13 | onto-ex10_13.htm | EX-10 | 143142
3 | EX-21.1 | onto-ex21_1.htm | EX-21 | 38440
4 | EX-23.1 | onto-ex23_1.htm | EX-23 | 7741
5 | EX-31.1 | onto-ex31_1.htm | EX-31 | 24480
6 | EX-31.2 | onto-ex31_2.htm | EX-31 | 24524
7 | EX-32.1 | onto-ex32_1.htm | EX-32 | 14113
8 | EX-32.2 | onto-ex32_2.htm | EX-32 | 14733
9 | GRAPHIC | img167067152_0.jpg | GRAPHIC | 437264
| Complete submission text file | 0000950170-23-004283.txt |  | 18032464

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
10 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | onto-20221231_pre.xml | EX-101.PRE | 427989
11 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | onto-20221231.xsd | EX-101.SCH | 68948
12 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | onto-20221231_lab.xml | EX-101.LAB | 598080
13 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | onto-20221231_cal.xml | EX-101.CAL | 90322
14 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | onto-20221231_def.xml | EX-101.DEF | 193147
98 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20221231_htm.xml | XML | 4243764

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-K | Act: 34 | File No.: 001-39110 | Film No.: 23663630
SIC: 3829 Measuring & Controlling Devices, NEC