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Share-Based Compensation and Employee Benefit Plans - Textual (Details) $ / shares in Units, shares in Thousands, $ in Thousands | 12 Months Ended
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Dec. 31, 2022 USD ($) Tradingday $ / shares shares | Jan. 01, 2022 USD ($) $ / shares shares | Dec. 26, 2020 USD ($) $ / shares shares
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Shares of common stock available for issuance pursuant to future grants | 3,086 |  |
Shares purchased under ESPP | 142 | 242 | 91
Employee stock purchase plan available | 1,116 | 1,258 |
Number of trading days for closing stock price performance or market price performance | Tradingday | 20 |  |
Total unrecognized compensation cost related to restricted stock units granted | $ | $ 28,653 |  |
Unrecognized compensation cost related to restricted stock units, weighted average period | 1 year 6 months |  |
Weighted average grant-date fair value per share | $ / shares | $ 69.01 |  |
Percentage of contribution for annual compensation | 100.00% |  |
Percentage of match of all employee contribution | 50.00% |  |
Total matching contribution to plan | $ | $ 2,965 | $ 2,544 | $ 2,315
Maximum [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Percentage of common Stock price performance compared to market price performance designated as bench mark | 200.00% |  |
Percentage of match on employee salary | 6.00% |  |
Minimum [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Percentage of common Stock price performance compared to market price performance designated as bench mark | 0.00% |  |
Onto Innovation 2020 Employee Stock Purchase Plan [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Price of common stock as percentage of fair market value | 85.00% |  |
Onto Innovation 2020 Employee Stock Purchase Plan [Member] | Maximum [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Eligible compensation deduction percentage on pay for purchase of common stock | 10.00% |  |
Restricted Stock Units (RSUs) [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Period of vesting | 3 years |  |
Performance Restricted Stock Units (PRSUs) [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Period of vesting | 3 years |  |
Weighted average grant-date fair value per share | $ / shares | $ 85.49 | $ 80.04 | $ 47.86
Onto Innovation 2020 Stock Plan [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Share authorized available for grants | 3,744 |  |
Period of vesting | 3 years |  |
Options expiration period | 10 years |  |
Onto Innovation 2020 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Employees [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Period of vesting | 3 years |  |
Onto Innovation 2020 Stock Plan [Member] | Restricted Stock Units (RSUs) [Member] | Directors [Member] |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |
Period of vesting | 1 year |  |

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