    <SEC-DOCUMENT>0000950170-23-010944-index.html : 20230330
    <SEC-HEADER>0000950170-23-010944.hdr.sgml : 20230330
    <ACCEPTANCE-DATETIME>20230330161459
    ACCESSION NUMBER:		0000950170-23-010944
    CONFORMED SUBMISSION TYPE:	ARS
    PUBLIC DOCUMENT COUNT:		1
    CONFORMED PERIOD OF REPORT:	20230330
    FILED AS OF DATE:		20230330
    DATE AS OF CHANGE:		20230330
    EFFECTIVENESS DATE:		20230330

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
    		CENTRAL INDEX KEY:			0000704532
    		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
    		IRS NUMBER:				942276314
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1226

    	FILING VALUES:
    		FORM TYPE:		ARS
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	001-39110
    		FILM NUMBER:		23780864

    	BUSINESS ADDRESS:
    		STREET 1:		16 JONSPIN ROAD
    		CITY:			WILMINGTON
    		STATE:			MA
    		ZIP:			01887
    		BUSINESS PHONE:		9782536200

    	MAIL ADDRESS:
    		STREET 1:		16 JONSPIN ROAD
    		CITY:			WILMINGTON
    		STATE:			MA
    		ZIP:			01887

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	Onto Innovation Inc.
    		DATE OF NAME CHANGE:	20191025

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	NANOMETRICS INC
    		DATE OF NAME CHANGE:	19920703
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>ARS
    <SEQUENCE>1
    <FILENAME>onto_annualreport_03.30.pdf
    <DESCRIPTION>ARS
    <TEXT>
    Document 1 - file: onto_annualreport_03.30.pdf

    </DOCUMENT>
    </SEC-DOCUMENT>