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v3.23.1

Disclosure - Restructuring (Additional Information) (Details) $ in Thousands | 3 Months Ended
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Apr. 01, 2023 USD ($)
Restructuring Charges [Abstract] |
Restructuring cost in cost of goods sold | $ 2,279
Restructuring cost in operating expenses | $ 2,034

X
- Definition Restructuring cost recored to cost of goods sold for inventory write-downs. + References No definition available. + Details
Name: | onto_RestructuringCostInCostOfGoodsSold
Namespace Prefix: | onto_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Restructuring cost recorded in operating expense for employee severance + References No definition available. + Details
Name: | onto_RestructuringCostInOperatingExpenses
Namespace Prefix: | onto_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- References No definition available. + Details
Name: | us-gaap_RestructuringChargesAbstract
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration