# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-017969
Filing Date
2023-05-04
Accepted
2023-05-04 17:14:38
Documents
86
Period of Report
2023-04-01

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-20230401.htm iXBRL | 10-Q | 2525848
2 | EX-31.1 | onto-ex31_1.htm | EX-31 | 24657
3 | EX-31.2 | onto-ex31_2.htm | EX-31 | 24702
4 | EX-32.1 | onto-ex32_1.htm | EX-32 | 14302
5 | EX-32.2 | onto-ex32_2.htm | EX-32 | 14922
| Complete submission text file | 0000950170-23-017969.txt |  | 10353772

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | onto-20230401_pre.xml | EX-101.PRE | 281047
7 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | onto-20230401_def.xml | EX-101.DEF | 118291
8 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | onto-20230401.xsd | EX-101.SCH | 49854
9 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | onto-20230401_cal.xml | EX-101.CAL | 64112
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | onto-20230401_lab.xml | EX-101.LAB | 380787
80 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20230401_htm.xml | XML | 2560619

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 23889960
SIC: 3829 Measuring & Controlling Devices, NEC