# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-041470
Filing Date
2023-08-10
Accepted
2023-08-10 17:09:52
Documents
88
Period of Report
2023-07-01

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-20230701.htm iXBRL | 10-Q | 3112359
2 | EX-31.1 | onto-ex31_1.htm | EX-31.1 | 24665
3 | EX-31.2 | onto-ex31_2.htm | EX-31.2 | 24710
4 | EX-32.1 | onto-ex32_1.htm | EX-32.1 | 14309
5 | EX-32.2 | onto-ex32_2.htm | EX-32.2 | 14929
| Complete submission text file | 0000950170-23-041470.txt |  | 12159179

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | onto-20230701_def.xml | EX-101.DEF | 119708
7 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | onto-20230701_pre.xml | EX-101.PRE | 283562
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | onto-20230701_cal.xml | EX-101.CAL | 61702
9 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | onto-20230701.xsd | EX-101.SCH | 50569
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | onto-20230701_lab.xml | EX-101.LAB | 383914
82 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20230701_htm.xml | XML | 3112037

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 231160587
SIC: 3829 Measuring & Controlling Devices, NEC