<SEC-DOCUMENT>0001257815-23-000039.txt : 20230511
<SEC-HEADER>0001257815-23-000039.hdr.sgml : 20230511
<ACCEPTANCE-DATETIME>20230511161209
ACCESSION NUMBER:		0001257815-23-000039
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20230509
FILED AS OF DATE:		20230511
DATE AS OF CHANGE:		20230511

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Kelley Stephen Douglas
		CENTRAL INDEX KEY:			0001443674

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		23911142

	MAIL ADDRESS:	
		STREET 1:		1900 S. PRICE ROAD
		CITY:			CHANDLER
		STATE:			AZ
		ZIP:			85286

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0407</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2023-05-09</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000704532</issuerCik>
        <issuerName>ONTO INNOVATION INC.</issuerName>
        <issuerTradingSymbol>ONTO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001443674</rptOwnerCik>
            <rptOwnerName>Kelley Stephen Douglas</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ONTO INNOVATION INC.</rptOwnerStreet1>
            <rptOwnerStreet2>16 JONSPIN ROAD</rptOwnerStreet2>
            <rptOwnerCity>WILMINGTON</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01887</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <aff10b5One>0</aff10b5One>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2023-05-09</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>2200</value>
                    <footnoteId id="F2"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>2700</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">The Reporting Person was granted restricted stock units (&quot;RSUs&quot;), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.</footnote>
        <footnote id="F2">100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>By: Mark R. Slicer For: Stephen Douglas Kelley</signatureName>
        <signatureDate>2023-05-11</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
