# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-23-010940
Filing Date
2023-03-30
Accepted
2023-03-30 16:12:54
Documents
28

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | onto-20230328.htm iXBRL | DEF 14A | 1801012
2 | GRAPHIC | img167961819_0.jpg | GRAPHIC | 20615
3 | GRAPHIC | img167961819_1.jpg | GRAPHIC | 20615
4 | GRAPHIC | img167961819_2.jpg | GRAPHIC | 371774
5 | GRAPHIC | img167961819_3.jpg | GRAPHIC | 20210
6 | GRAPHIC | img167961819_4.jpg | GRAPHIC | 133008
7 | GRAPHIC | img167961819_5.jpg | GRAPHIC | 27854
8 | GRAPHIC | img167961819_6.jpg | GRAPHIC | 22709
9 | GRAPHIC | img167961819_7.jpg | GRAPHIC | 21189
10 | GRAPHIC | img167961819_8.jpg | GRAPHIC | 28293
11 | GRAPHIC | img167961819_9.jpg | GRAPHIC | 10243
12 | GRAPHIC | img167961819_10.jpg | GRAPHIC | 16586
13 | GRAPHIC | img167961819_11.jpg | GRAPHIC | 250102
14 | GRAPHIC | img167961819_12.jpg | GRAPHIC | 271353
15 | GRAPHIC | img167961819_13.jpg | GRAPHIC | 261514
| Complete submission text file | 0000950170-23-010940.txt |  | 6254234

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
16 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | onto-20230328_pre.xml | EX-101.PRE | 9946
17 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | onto-20230328_def.xml | EX-101.DEF | 5971
18 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | onto-20230328_lab.xml | EX-101.LAB | 14859
19 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | onto-20230328.xsd | EX-101.SCH | 5990
22 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20230328_htm.xml | XML | 289280

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: DEF 14A | Act: 34 | File No.: 001-39110 | Film No.: 23780830
SIC: 3829 Measuring & Controlling Devices, NEC