# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-24-020150
Filing Date
2024-02-26
Accepted
2024-02-26 16:10:23
Documents
108
Period of Report
2023-12-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | onto-20231230.htm iXBRL | 10-K | 2901775
2 | EX-10.6 | onto-ex10_6.htm | EX-10.6 | 69992
3 | EX-10.7 | onto-ex10_7.htm | EX-10.7 | 64043
4 | EX-21.1 | onto-ex21_1.htm | EX-21.1 | 23442
5 | EX-23.1 | onto-ex23_1.htm | EX-23.1 | 6398
6 | EX-31.1 | onto-ex31_1.htm | EX-31.1 | 17842
7 | EX-31.2 | onto-ex31_2.htm | EX-31.2 | 17906
8 | EX-32.1 | onto-ex32_1.htm | EX-32.1 | 10030
9 | EX-32.2 | onto-ex32_2.htm | EX-32.2 | 10552
10 | EX-97 | onto-ex97.htm | EX-97 | 57037
11 | GRAPHIC | img167990672_0.jpg | GRAPHIC | 360719
12 | GRAPHIC | img210172367_0.jpg | GRAPHIC | 8198
13 | GRAPHIC | img211095888_0.jpg | GRAPHIC | 8198
| Complete submission text file | 0000950170-24-020150.txt |  | 13125379

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
14 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | onto-20231230.xsd | EX-101.SCH | 1405198
110 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20231230_htm.xml | XML | 2567905

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-K | Act: 34 | File No.: 001-39110 | Film No.: 24678800
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)