<SEC-DOCUMENT>0002022859-24-000028-index.html : 20240716
<SEC-HEADER>0002022859-24-000028.hdr.sgml : 20240716
<ACCEPTANCE-DATETIME>20240716161101
ACCESSION NUMBER:		0002022859-24-000028
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20240716
FILED AS OF DATE:		20240716
DATE AS OF CHANGE:		20240716

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			SCHWARTZ STEPHEN S
		CENTRAL INDEX KEY:			0001247436
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		241119777

	MAIL ADDRESS:	
		STREET 1:		46897 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: edgardoc.html

Document 1 - RAW XML: edgardoc.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>exhibit24.txt
<DESCRIPTION>EDGAR SUPPORTING DOCUMENT
<TEXT>
Document 2 - file: exhibit24.txt

</DOCUMENT>
</SEC-DOCUMENT>