# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-24-042066
Filing Date
2024-04-05
Accepted
2024-04-05 08:31:24
Documents
30
Period of Report
2024-04-05

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | onto-20240404.htm iXBRL | DEF 14A | 1363932
2 | GRAPHIC | img168886235_0.jpg | GRAPHIC | 3931
3 | GRAPHIC | img168886235_1.jpg | GRAPHIC | 20615
4 | GRAPHIC | img168886235_2.jpg | GRAPHIC | 20615
5 | GRAPHIC | img168886235_3.jpg | GRAPHIC | 165414
6 | GRAPHIC | img168886235_4.jpg | GRAPHIC | 20210
7 | GRAPHIC | img168886235_5.jpg | GRAPHIC | 133008
8 | GRAPHIC | img168886235_6.jpg | GRAPHIC | 41281
9 | GRAPHIC | img168886235_7.jpg | GRAPHIC | 27854
10 | GRAPHIC | img168886235_8.jpg | GRAPHIC | 22709
11 | GRAPHIC | img168886235_9.jpg | GRAPHIC | 2407924
12 | GRAPHIC | img168886235_10.jpg | GRAPHIC | 10243
13 | GRAPHIC | img168886235_11.jpg | GRAPHIC | 16586
14 | GRAPHIC | img168886235_12.jpg | GRAPHIC | 53736
15 | GRAPHIC | img168886235_13.jpg | GRAPHIC | 65637
16 | GRAPHIC | img168886235_14.jpg | GRAPHIC | 293316
17 | GRAPHIC | img168886235_15.jpg | GRAPHIC | 270826
18 | GRAPHIC | img168886235_16.jpg | GRAPHIC | 270039
19 | GRAPHIC | img168886235_17.jpg | GRAPHIC | 746180
20 | GRAPHIC | img168886235_18.jpg | GRAPHIC | 179712
| Complete submission text file | 0000950170-24-042066.txt |  | 14144992

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
21 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | onto-20240404.xsd | EX-101.SCH | 38213
34 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20240404_htm.xml | XML | 197668

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: DEF 14A | Act: 34 | File No.: 001-39110 | Film No.: 24824838
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)