<SEC-DOCUMENT>0000950170-24-066554-index.html : 20240530
<SEC-HEADER>0000950170-24-066554.hdr.sgml : 20240530
<ACCEPTANCE-DATETIME>20240530160419
ACCESSION NUMBER:		0000950170-24-066554
CONFORMED SUBMISSION TYPE:	SD
PUBLIC DOCUMENT COUNT:		2
<RULE>
<RULE-NAME>13p-1
<ITEM>
<ITEM-NUMBER>1.01
<ITEM-PERIOD>20231230
</ITEM>
<ITEM>
<ITEM-NUMBER>1.02
<ITEM-PERIOD>20231230
</ITEM>
</RULE>
FILED AS OF DATE:		20240530
DATE AS OF CHANGE:		20240530

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		SD
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		241005135

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>SD
<SEQUENCE>1
<FILENAME>onto_sd_2024.htm
<DESCRIPTION>SD
<TEXT>
Document 1 - file: onto_sd_2024.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-1.01
<SEQUENCE>2
<FILENAME>onto-ex1_01.htm
<DESCRIPTION>EX-1.01
<TEXT>
Document 2 - file: onto-ex1_01.htm

</DOCUMENT>
</SEC-DOCUMENT>