# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-25-105161
Filing Date
2025-08-07
Accepted
2025-08-07 16:46:04
Documents
91
Period of Report
2025-06-28

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | onto-20250628.htm iXBRL | 10-Q | 2675890
2 | EX-31.1 | onto-ex31_1.htm | EX-31.1 | 20439
3 | EX-31.2 | onto-ex31_2.htm | EX-31.2 | 20506
4 | EX-32.1 | onto-ex32_1.htm | EX-32.1 | 11827
5 | EX-32.2 | onto-ex32_2.htm | EX-32.2 | 12383
| Complete submission text file | 0000950170-25-105161.txt |  | 11889851

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | onto-20250628.xsd | EX-101.SCH | 1030611
94 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20250628_htm.xml | XML | 2988186

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 251194942
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)