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Balance Sheet Details - Schedule of Other Assets (Details) - USD ($) $ in Thousands	Sep. 27, 2025	Dec. 28, 2024
Other Assets [Abstract]
Operating lease right-of-use assets	$ 13,044	$ 13,939
Non-Marketable Equity Securities	8,000	0
Other	2,198	1,514
Total other assets	$ 23,242	$ 15,453

X

- Definition

Non-Marketable Equity Securities

+ References

No definition available.

+ Details

Name:	onto_Non-MarketableEquitySecurities
Namespace Prefix:	onto_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- Definition

Amount of lessee's right to use underlying asset under operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (a)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_OperatingLeaseRightOfUseAsset
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- References

No definition available.

+ Details

Name:	us-gaap_OtherAssetsAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Amount of other miscellaneous assets expected to be realized or consumed after one year or normal operating cycle, if longer.

+ References

No definition available.

+ Details

Name:	us-gaap_OtherAssetsMiscellaneousNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- Definition

Amount of noncurrent assets classified as other.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 210
-SubTopic 10
-Name Accounting Standards Codification
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02(17))
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147480566/210-10-S99-1

+ Details

Name:	us-gaap_OtherAssetsNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant