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Disclosure - Restructuring (Additional Information) (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 27, 2025	Sep. 28, 2024	Sep. 27, 2025	Sep. 28, 2024
Restructuring Charges [Abstract]
Restructuring cost in cost of goods sold	$ (7,303)	$ (1,084)	$ (27,129)	$ (2,575)
RestructuringCost	(11,377)	(3,251)	(38,550)	(5,621)
Restructuring costs in operating expenses	$ (4,074)	$ (2,167)	$ (11,421)	$ (3,046)

X

- Definition

Restructuring and other cost recored to cost of goods sold

+ References

No definition available.

+ Details

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Namespace Prefix:	onto_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- Definition

Restructuring and other cost recorded in operating expense

+ References

No definition available.

+ Details

Name:	onto_RestructuringCostInOperatingExpenses
Namespace Prefix:	onto_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- Definition

RestructuringCost

+ References

No definition available.

+ Details

Name:	onto_Restructuringcost
Namespace Prefix:	onto_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration