<SEC-DOCUMENT>0002022859-25-000068-index.html : 20250613
<SEC-HEADER>0002022859-25-000068.hdr.sgml : 20250613
<ACCEPTANCE-DATETIME>20250613164701
ACCESSION NUMBER:		0002022859-25-000068
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20250612
FILED AS OF DATE:		20250613
DATE AS OF CHANGE:		20250613

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Slicer Mark
		CENTRAL INDEX KEY:			0001930126
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		251047349

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		EIN:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: primary_doc.html

Document 1 - RAW XML: primary_doc.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>exhibit24.txt
<TEXT>
Document 2 - file: exhibit24.txt

</DOCUMENT>
</SEC-DOCUMENT>