# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-25-052319
Filing Date
2025-04-09
Accepted
2025-04-09 08:54:36
Documents
29
Period of Report
2025-05-21

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | onto-20250408.htm iXBRL | DEF 14A | 1558304
2 | GRAPHIC | img169809760_0.jpg | GRAPHIC | 11127
3 | GRAPHIC | img169809760_1.jpg | GRAPHIC | 63266
4 | GRAPHIC | img169809760_2.jpg | GRAPHIC | 63266
5 | GRAPHIC | img169809760_3.jpg | GRAPHIC | 356873
6 | GRAPHIC | img169809760_4.jpg | GRAPHIC | 133008
7 | GRAPHIC | img169809760_5.jpg | GRAPHIC | 41281
8 | GRAPHIC | img169809760_6.jpg | GRAPHIC | 27854
9 | GRAPHIC | img169809760_7.jpg | GRAPHIC | 22709
10 | GRAPHIC | img169809760_8.jpg | GRAPHIC | 73617
11 | GRAPHIC | img169809760_9.jpg | GRAPHIC | 2407924
12 | GRAPHIC | img169809760_10.jpg | GRAPHIC | 41873
13 | GRAPHIC | img169809760_11.jpg | GRAPHIC | 129604
14 | GRAPHIC | img169809760_12.jpg | GRAPHIC | 159743
15 | GRAPHIC | img169809760_13.jpg | GRAPHIC | 600241
16 | GRAPHIC | img169809760_14.jpg | GRAPHIC | 564959
17 | GRAPHIC | img169809760_15.jpg | GRAPHIC | 558980
18 | GRAPHIC | img169809760_16.jpg | GRAPHIC | 716144
19 | GRAPHIC | img169809760_17.jpg | GRAPHIC | 179630
| Complete submission text file | 0000950170-25-052319.txt |  | 18626001

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
20 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | onto-20250408.xsd | EX-101.SCH | 38439
31 | EXTRACTED XBRL INSTANCE DOCUMENT | onto-20250408_htm.xml | XML | 556959

Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: DEF 14A | Act: 34 | File No.: 001-39110 | Film No.: 25823933
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)