<SEC-DOCUMENT>0000950170-25-052319-index.html : 20250409
<SEC-HEADER>0000950170-25-052319.hdr.sgml : 20250409
<ACCEPTANCE-DATETIME>20250409085436
ACCESSION NUMBER:		0000950170-25-052319
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		29
CONFORMED PERIOD OF REPORT:	20250521
FILED AS OF DATE:		20250409
DATE AS OF CHANGE:		20250409

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		EIN:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		25823933

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>onto-20250408.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: onto-20250408.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>img169809760_0.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: img169809760_0.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>img169809760_1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: img169809760_1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>img169809760_2.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: img169809760_2.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>img169809760_3.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: img169809760_3.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>img169809760_4.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: img169809760_4.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>img169809760_5.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: img169809760_5.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>img169809760_6.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: img169809760_6.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>img169809760_7.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: img169809760_7.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>img169809760_8.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: img169809760_8.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>img169809760_9.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: img169809760_9.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>img169809760_10.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: img169809760_10.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>img169809760_11.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: img169809760_11.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>img169809760_12.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: img169809760_12.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>15
<FILENAME>img169809760_13.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 15 - file: img169809760_13.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>16
<FILENAME>img169809760_14.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 16 - file: img169809760_14.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>17
<FILENAME>img169809760_15.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 17 - file: img169809760_15.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>18
<FILENAME>img169809760_16.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 18 - file: img169809760_16.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>19
<FILENAME>img169809760_17.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 19 - file: img169809760_17.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>20
<FILENAME>onto-20250408.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT
<TEXT>
Document 20 - file: onto-20250408.xsd

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>22
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 22 - file: R1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>23
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 23 - file: R2.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>24
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 24 - file: Show.js

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>25
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 25 - file: report.css

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>27
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 27 - file: FilingSummary.html

Document 27 - RAW XML: FilingSummary.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>29
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 29 - file: MetaLinks.json

</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>30
<FILENAME>0000950170-25-052319-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 30 - file: 0000950170-25-052319-xbrl.zip

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>31
<FILENAME>onto-20250408_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 31 - file: onto-20250408_htm.html

Document 31 - RAW XML: onto-20250408_htm.xml

</DOCUMENT>
</SEC-DOCUMENT>