Form S-3 - Registration statement under Securities Act of 1933:
SEC Accession No. 0001193125-25-291335
Filing Date
2025-11-21
Accepted
2025-11-21 16:03:15
Documents
15

Document Format Files

Seq Description Document Type Size
1 S-3 onto-20251121.htm S-3 221449
2 EX-5.1 onto-ex5_1.htm EX-5.1 19624
3 EX-23.1 onto-ex23_1.htm EX-23.1 7962
4 EX-FILING FEES onto-exfiling_fees.htm   iXBRL EX-FILING FEES 25156
5 GRAPHIC img169836723_0.jpg GRAPHIC 27921
  Complete submission text file 0001193125-25-291335.txt   434962

Data Files

Seq Description Document Type Size
17 EXTRACTED XBRL INSTANCE DOCUMENT onto-exfiling_fees_htm.xml XML 4535
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: S-3 | Act: 33 | File No.: 333-291695 | Film No.: 251507843
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)