Form S-3ASR - Automatic shelf registration statement of securities of well-known seasoned issuers:
SEC Accession No. 0001193125-25-300481
Filing Date
2025-11-26
Accepted
2025-11-26 16:02:36
Documents
16
Effectiveness Date
2025-11-26

Document Format Files

Seq Description Document Type Size
1 S-3ASR onto-20251126.htm S-3ASR 196163
2 EX-5.1 onto-ex5_1.htm EX-5.1 19628
3 EX-23.1 onto-ex23_1.htm EX-23.1 7983
4 EX-FILING FEES onto-exfiling_fees.htm   iXBRL EX-FILING FEES 30602
5 GRAPHIC img169836728_0.jpg GRAPHIC 27921
  Complete submission text file 0001193125-25-300481.txt   452992

Data Files

Seq Description Document Type Size
18 EXTRACTED XBRL INSTANCE DOCUMENT onto-exfiling_fees_htm.xml XML 8042
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

EIN.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: S-3ASR | Act: 33 | File No.: 333-291811 | Film No.: 251530004
SIC: 3829 Measuring & Controlling Devices, NEC
(CF Office: 08 Industrial Applications and Services)