<SEC-DOCUMENT>0001193125-25-236464.txt : 20251010
<SEC-HEADER>0001193125-25-236464.hdr.sgml : 20251010
<ACCEPTANCE-DATETIME>20251010090033
ACCESSION NUMBER:		0001193125-25-236464
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		11
CONFORMED PERIOD OF REPORT:	20251009
ITEM INFORMATION:		Entry into a Material Definitive Agreement
ITEM INFORMATION:		Regulation FD Disclosure
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20251010
DATE AS OF CHANGE:		20251010

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		EIN:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		251386378

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>onto-20251009.htm
<DESCRIPTION>8-K
<TEXT>
<XBRL>
<?xml version='1.0' encoding='ASCII'?>
<!-- DFIN New ActiveDisclosure (SM) Inline XBRL Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2025-10-10T08:38:41.0959+00:00 -->
<!-- Copyright (c) 2025 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<html xmlns="http://www.w3.org/1999/xhtml" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:nonNumeric="http://www.xbrl.org/dtr/type/non-numeric" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dei="http://xbrl.sec.gov/dei/2025" xmlns:onto="http://ontoinnovation.com/20251009" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2022-02-16">
 <head>
  <title>8-K</title>
  <meta http-equiv="Content-Type" content="text/html"/>
 </head>
 <body style="padding:8px;margin:auto!important;z-index:0;-webkit-text-size-adjust:100%;position:relative;">
  <div style="display:none;"><ix:header><ix:hidden><ix:nonNumeric id="F_37f6e8a7-9b4d-4028-bbef-76b99492b839" name="dei:EntityCentralIndexKey" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8">0000704532</ix:nonNumeric><ix:nonNumeric id="F_0fe51dc4-ab76-4366-b9e3-215130fd21a3" name="dei:AmendmentFlag" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8">false</ix:nonNumeric></ix:hidden><ix:references><link:schemaRef xlink:type="simple" xlink:href="onto-20251009.xsd"/></ix:references><ix:resources><xbrli:context id="C_ee245b72-bc7e-4b47-bed4-f334348856b8"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000704532</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2025-10-09</xbrli:startDate><xbrli:endDate>2025-10-09</xbrli:endDate></xbrli:period></xbrli:context></ix:resources></ix:header></div>
  <div style="z-index:2;min-height:0.5in;position:relative;"></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="border-top:2.25pt double #000000;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><p style="font-size:10pt;margin-top:5.75pt;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:18pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">UNITED STATES<br/>SECURITIES AND EXCHANGE COMMISSION<br/></span><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">WASHINGTON, D.C. 20549</span></p><p style="margin-left:40%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;border-bottom:0.75pt solid #000000;margin-right:40%;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><h2 style="font-size:10pt;margin-top:10pt;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-size:18pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">FORM </span><span style="font-size:18pt;font-family:Times New Roman;"><ix:nonNumeric id="F_fe7cbe3f-3cc8-4403-9488-f1123b8b9176" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:DocumentType"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:18pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">8-K</span></ix:nonNumeric></span></h2><p style="margin-left:40%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;border-bottom:0.75pt solid #000000;margin-right:40%;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><p style="font-size:10pt;margin-top:9pt;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">CURRENT REPORT</span></p><p style="font-size:10pt;margin-top:9pt;font-family:Times New Roman;margin-bottom:6pt;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934</span></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:100%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:0.398%;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Date of Report (Date of earliest event reported): </span><span><ix:nonNumeric id="F_c84fbd69-76d2-442b-bf0e-c823ef9d2e62" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:DocumentPeriodEndDate" format="ixt:date-monthname-day-year-en"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">October 09, 2025</span></ix:nonNumeric></span></p></td>
    </tr>
   </table><p style="margin-left:40%;font-size:10pt;margin-top:5pt;font-family:Times New Roman;margin-bottom:0;border-bottom:0.75pt solid #000000;margin-right:40%;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><p style="font-size:10pt;margin-top:5pt;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="font-size:24pt;font-family:Times New Roman;"><ix:nonNumeric id="F_90b7564f-8b96-4eb7-84f3-9d8a30a5e67b" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityRegistrantName"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:24pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Onto Innovation Inc.</span></ix:nonNumeric></span></p><p style="font-size:10pt;margin-top:3pt;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(Exact name of Registrant as Specified in Its Charter)</span></p><p style="margin-left:40%;font-size:10pt;margin-top:9pt;font-family:Times New Roman;margin-bottom:0;border-bottom:0.75pt solid #000000;margin-right:40%;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:20%;box-sizing:content-box;"/>
     <td style="width:1%;box-sizing:content-box;"/>
     <td style="width:20%;box-sizing:content-box;"/>
     <td style="width:18%;box-sizing:content-box;"/>
     <td style="width:41%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td colspan="3" style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_50153c35-7a0d-4f4b-bff6-799f40400a28" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityIncorporationStateCountryCode" format="ixt-sec:stateprovnameen"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Delaware</span></ix:nonNumeric></span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_dadf339f-764e-4bd9-8f7c-82e534d033f0" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityFileNumber"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">001-39110</span></ix:nonNumeric></span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_da806d10-42e8-4350-a20c-33ede2e8e003" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityTaxIdentificationNumber"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">94-2276314</span></ix:nonNumeric></span></p></td>
    </tr>
    <tr style="height:7pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td colspan="3" style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:7.5pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">(State or Other Jurisdiction<br/>of Incorporation)</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:7.5pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">(Commission File Number)</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:7.5pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">(IRS Employer<br/>Identification No.)</span></p></td>
    </tr>
    <tr style="word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td colspan="3" style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_f965727d-e1d5-444f-ae55-e7d65910b559" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityAddressAddressLine1"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">16 Jonspin Road</span></ix:nonNumeric></span></p></td>
     <td colspan="2" style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td colspan="3" style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_d42baf75-78c8-4225-a451-2e8d2ef13c31" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityAddressCityOrTown"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Wilmington</span></ix:nonNumeric></span><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">, </span><span><ix:nonNumeric id="F_9e6b62a8-9b7a-490b-b6c3-f5173a83ac27" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityAddressStateOrProvince" format="ixt-sec:stateprovnameen"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Massachusetts</span></ix:nonNumeric></span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:bottom;padding-bottom:0in;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_ebfbfd97-16fa-41bc-afa7-4ff08d5299b5" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityAddressPostalZipCode"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">01887</span></ix:nonNumeric></span></p></td>
    </tr>
    <tr style="height:7pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td colspan="3" style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:7.5pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">(Address of Principal Executive Offices)</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:7.5pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">(Zip Code)</span></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:100%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td style="padding-top:0.125in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:0.398%;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Registrant&#8217;s Telephone Number, Including Area Code:</span><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </span><span><ix:nonNumeric id="F_117766e2-3d4e-4da3-936a-a5ec493d64e0" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:CityAreaCode"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">(978)</span></ix:nonNumeric></span><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </span><span><ix:nonNumeric id="F_00db2e61-7445-4bed-84b9-d5a51c8f1e1e" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:LocalPhoneNumber"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">253-6200</span></ix:nonNumeric></span></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:100%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
     <td style="padding-top:0.125in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_cf486385-46a6-4150-b432-079e9931d85f" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityInformationFormerLegalOrRegisteredName"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Not applicable</span></ix:nonNumeric></span></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(Former Name or Former Address, if Changed Since Last Report)</span></p><p style="margin-left:40%;font-size:10pt;margin-top:9.35pt;font-family:Times New Roman;margin-bottom:0;border-bottom:0.75pt solid #000000;margin-right:40%;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p><p style="font-size:10pt;margin-top:9.35pt;font-family:Times New Roman;margin-bottom:6pt;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </span></p><div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:3pt;margin-bottom:0;text-align:left;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10pt;font-family:Times New Roman;"><ix:nonNumeric id="F_f1075d87-c5b1-4ae7-84f8-9fe222996fd0" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:WrittenCommunications" format="ixt-sec:boolballotbox"><span style="font-size:10pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)</span></div><div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:6pt;margin-bottom:0;text-align:left;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10pt;font-family:Times New Roman;"><ix:nonNumeric id="F_839bc3e1-d13c-4c73-ad05-9a9b34b24c51" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:SolicitingMaterial" format="ixt-sec:boolballotbox"><span style="font-size:10pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)</span></div><div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:6pt;margin-bottom:0;text-align:left;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10pt;font-family:Times New Roman;"><ix:nonNumeric id="F_dbab98dd-504e-4b14-a255-32f19016655d" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:PreCommencementTenderOffer" format="ixt-sec:boolballotbox"><span style="font-size:10pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))</span></div><div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:6pt;margin-bottom:0;text-align:left;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10pt;font-family:Times New Roman;"><ix:nonNumeric id="F_e6574717-e77b-445b-9ffd-8e5a92425208" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:PreCommencementIssuerTenderOffer" format="ixt-sec:boolballotbox"><span style="font-size:10pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))</span></div><p style="font-size:10pt;margin-top:9pt;font-family:Times New Roman;margin-bottom:9pt;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Securities registered pursuant to Section 12(b) of the Act:</span></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:38%;box-sizing:content-box;"/>
     <td style="width:1%;box-sizing:content-box;"/>
     <td style="width:15%;box-sizing:content-box;"/>
     <td style="width:1%;box-sizing:content-box;"/>
     <td style="width:45%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;border-bottom:0.25pt solid;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;"><br/>Title of each class</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;border-bottom:0.25pt solid #ffffff03;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;border-bottom:0.25pt solid;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Trading<br/>Symbol(s)</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;border-bottom:0.25pt solid #ffffff03;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;border-bottom:0.25pt solid;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;"><br/>Name of each exchange on which registered</span></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_4ecb82af-b3bb-4d78-9fb8-12428c26fcb9" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:Security12bTitle"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Common Stock, $0.001 par value per share</span></ix:nonNumeric></span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_1117f262-3c3f-4674-bda9-284472ed6f08" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:TradingSymbol"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">ONTO</span></ix:nonNumeric></span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span><ix:nonNumeric id="F_8402026b-830f-4818-8001-49874d5890a2" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:SecurityExchangeName" format="ixt-sec:exchnameen"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">New York Stock Exchange</span></ix:nonNumeric></span></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:12pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (&#167;&#8239;230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (&#167;&#8239;240.12b-2 of this chapter).</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </span></p><p style="font-size:10pt;margin-top:9pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Emerging growth company </span><span style="font-size:10pt;"><ix:nonNumeric id="F_84ac77aa-6ec5-446a-8ea0-63eba280bad8" contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8" name="dei:EntityEmergingGrowthCompany" format="ixt-sec:boolballotbox"><span style="font-size:10pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></p><p style="font-size:10pt;margin-top:9pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. </span><span style="font-size:10pt;font-family:Times New Roman;">&#9744;</span></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;border-bottom:2.25pt double #000000;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;min-height:0.5in;justify-content:flex-end;position:relative;"></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;"/>
  <div style="z-index:2;min-height:0.5in;position:relative;"></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:6pt;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Item 1.01.  Entry into a Material Definitive Agreement</span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:6pt;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">As previously announced, on June 27, 2025, Onto Innovation Inc. (the &#8220;Company&#8221;) entered into an Equity Purchase Agreement (the &#8220;Purchase Agreement&#8221;) with Semilab International Zrt. (the &#8220;Seller&#8221;), Semilab Zrt. and Semilab USA LLC (&#8220;Semilab USA&#8221;), pursuant to which the Company agreed to acquire all of the outstanding membership interests of Semilab USA from the Seller (the &#8220;Transaction&#8221;), subject to the satisfaction of customary closing conditions, including the expiration or termination of any waiting period applicable under the Hart-Scott-Rodino Antitrust Improvements Act of 1976, as amended (the &#8220;HSR Act&#8221;), and receipt of Hungarian foreign direct investment approval.  Hungarian foreign direct investment approval was received in September 2025.</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">  </span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">On September 25, 2025, each of the Company and the Seller received a request for additional information and documentary material (a &#8220;Second Request&#8221;) from the U.S. Department of Justice (the &#8220;DOJ&#8221;) in connection with the Transaction. The Second Request extends the waiting period imposed by the HSR Act to 30 days after the Company and the Seller have substantially complied with the Second Request, which could take a significant amount of time.</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">In response to the Second Request, and in order to increase the likelihood of a timely closing for the Transaction, on October 9, 2025, the parties entered into an amendment to the Purchase Agreement (the &#8220;Purchase Agreement Amendment&#8221;), pursuant to which the parties agreed that the Fourier-Transform infrared spectroscopy reflectometry systems business conducted by the Seller and its affiliates (the &#8220;EIR Business&#8221;) would not be included in the Transaction and would instead be retained by the Seller. The Purchase Agreement Amendment amends the purchase price that the Company will pay to the Seller in the Transaction to $432,310,000 in cash (subject to certain customary purchase price adjustments) and 641,771 shares of the Company&#8217;s common stock, par value $0.001 per share.  This represents a reduction of approximately $50 million in purchase price to approximately $495 million based upon the closing value of the Company&#8217;s common stock on June 27, 2025.</span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Company and the Seller intend to withdraw their existing HSR Act filings with the DOJ, and submit a notification and report form with the DOJ and the Federal Trade Commission (the &#8220;FTC&#8221;) with respect to the Transaction as amended pursuant to the Purchase Agreement Amendment. Closing of the Transaction is subject to the expiration or termination of any waiting period applicable under the HSR Act, and the Company and the Seller intend to continue working cooperatively with the DOJ and/or the FTC to obtain regulatory clearance for the Transaction as expeditiously as possible.</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The foregoing description of the Purchase Agreement Amendment is qualified entirely by reference to the full text of the Purchase Agreement Amendment, a copy of which is filed as Exhibit 2.1 to this Current Report on Form 8-K and incorporated herein by reference.</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">  </span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Purchase Agreement Amendment has been attached to provide investors with information regarding its terms. It is not intended to provide any other factual information about the Company, Semilab USA, their respective subsidiaries or any of the other parties to the Purchase Agreement Amendment or any related documents.</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </span></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Item 7.01.  Regulation FD Disclosure</span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The EIR Business represents approximately $13 million, or 10%, of estimated 2025 revenue for Semilab USA.  The Company expects that the business to be acquired, excluding the EIR Business, pursuant to the amended Transaction will generate approximately $120 million in annual revenue and will increase earnings per share by approximately 10% in the first year following the close of the transaction.  Additionally, the Company affirms its third quarter guidance, initially provided on August 7, 2025.</span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Company continues to anticipate that the Transaction will be completed in 2025.</span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The information contained in Item 7.01 of this Current Report on Form 8-K shall be deemed furnished and not &#8220;filed&#8221; for purposes of Section 18 of the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8221;) or otherwise subject to the liabilities of that section, nor shall it be deemed incorporated by reference in any filing under the Securities Act of 1933, as amended, or the Exchange Act, regardless of any general incorporation by reference language in such filing, except as expressly set forth by specific reference in such filing.</span></p><h2 style="font-size:10pt;margin-top:12pt;font-family:Times New Roman;margin-bottom:6pt;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Item 9.01 Financial Statements and Exhibits.</span></h2><h2 style="margin-left:4.533%;font-size:10pt;margin-top:12pt;font-family:Times New Roman;margin-bottom:6pt;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-weight:normal;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(d) Exhibits</span></h2>
   <table style="margin-left:auto;border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;margin-right:auto;">
    <tr style="visibility:collapse;">
     <td style="width:10%;box-sizing:content-box;"/>
     <td style="width:90%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0.01in;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Exhibit No.</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0.01in;"><p style="text-indent:4%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Description of Exhibit</span></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;text-indent:7.2pt;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0.01in;"><p style="margin-left:1.333%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><a href="onto-ex2_1.htm"><span style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">2.1*</span></a></p></td>
     <td style="padding-top:0.01in;text-indent:21.6pt;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0.01in;"><p style="margin-left:4%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><a href="onto-ex2_1.htm"><span style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Amendment to Equity Purchase Agreement, dated as of October 9, 2025, by and among Onto Innovation Inc., Semilab USA LLC, Semilab International Zrt. and Semilab Zrt.*</span></a></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;text-indent:7.2pt;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0.01in;"><p style="margin-left:1.333%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">104</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0.01in;"><p style="text-indent:4%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Cover Page Interaction Data File (embedded within the Inline XBRL document)</span></p></td>
    </tr>
   </table><h2 style="margin-left:4.533%;font-size:10pt;margin-top:18pt;font-family:Times New Roman;margin-bottom:6pt;text-align:left;"><span style="white-space:pre-wrap;font-size:13pt;font-family:'Calibri Light',sans-serif;font-kerning:none;min-width:fit-content;"></span>&#160;</h2>
   <table style="border-spacing:0;table-layout:auto;width:98.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:3.94%;box-sizing:content-box;"/>
     <td style="width:96.06%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:21.15pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">*</span></p></td>
     <td style="padding-top:0in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Schedules omitted pursuant to Item 601(b)(2) of Regulation S-K. The Company agrees to furnish supplementally a copy of any omitted schedule or exhibit to the SEC upon request.</span><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </span></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;min-height:0.5in;justify-content:flex-end;position:relative;"></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;"/>
  <div style="z-index:2;min-height:0.5in;position:relative;"></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">CAUTIONARY STATEMENT REGARDING FORWARD-LOOKING STATEMENTS</span></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:6pt;text-align:justify;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">This Current Report on Form 8-K contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the &#8220;Act&#8221;) which include statements relating to its projected financial performance and the projected financial performance of the acquired business; the Company&#8217;s business momentum and future growth; the benefit to customers and the capabilities of the Company&#8217;s products and customer service; the Company&#8217;s ability to both deliver products and services consistent with our customers&#8217; demands and expectations and strengthen its market position, the Company&#8217;s beliefs about market opportunities, the timing and ability of the Company to complete the Transaction, the benefits of the Transaction to the Company, its stockholders and its customers, as well as other matters that are not purely historical data.  The Company wishes to take advantage of the &#8220;safe harbor&#8221; provided for by the Act and cautions investors not to place undue reliance on any forward-looking statements and that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond the Company&#8217;s control. Such factors include, but are not limited to, one or more closing conditions to the Transaction, including certain regulatory approvals, may not be satisfied or waived, on a timely basis or otherwise, including that a governmental entity may prohibit, delay, or refuse to grant approval for the consummation of the proposed Transaction, or may require conditions, limitations, or restrictions in connection with such approvals; the risk that the Transaction may not be completed in the time frame expected by the Company, or at all; unexpected costs, charges, or expenses resulting from the Transaction;  failure to realize the anticipated benefits of the Transaction, including as a result of delay in completing the Transaction or integrating the acquired business with the business of the Company; difficulties and delays in achieving revenue and cost synergies anticipated to be realized from the Transaction; the occurrence of any event that could give rise to termination of the Transaction; evolving legal, regulatory, and tax regimes; changes in economic, financial, political, and regulatory conditions, in the United States and elsewhere, and other factors that contribute to uncertainty and volatility, natural and man-made disasters, civil unrest, pandemics, geopolitical uncertainty, and conditions that may result from legislative, regulatory, trade, and policy changes; risks related to disruption of management time from ongoing business operations due to the Transaction; the risk that the Transaction and its announcement could have an adverse effect on the ability of the Company or the acquired business to retain customers and retain and hire key personnel and maintain relationships with customers, suppliers, employees, stockholders, strategic partners and other business relationships and on their operating results and business generally; the Company&#8217;s ability to deploy its resources to improve its position in its core markets; its ability to weather difficult economic environments; its ability to open new market opportunities and target high-margin markets; the strength/weakness of the back-end and/or front-end semiconductor market segments; fluctuations in customer capital spending; the Company&#8217;s ability to effectively manage its supply chain and adequately source components from suppliers to meet customer demand; its ability to adequately protect its intellectual property rights and maintain data security; its ability to effectively maneuver global trade issues and changes in trade and export license policies; the Company&#8217;s ability to maintain relationships with its customers and manage appropriate levels of inventory to meet customer demands; and the Company&#8217;s ability to successfully integrate acquired businesses and technologies. Additional information and considerations regarding the risks faced by the Company are available in the Company&#8217;s Annual Report on Form 10-K for the year ended December 28, 2024, and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on the Company&#8217;s current expectations, the Company cannot guarantee any related future results, levels of activity, performance or achievements. The Company does not assume any obligation to update the forward-looking information contained in this Current Report on Form 8-K, except as required by law. Neither future distribution of this Current Report on Form 8-K nor the continued availability of this Current Report on Form 8-K should be deemed to constitute an update or re-affirmation of these statements as of any future date.</span><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </span></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;min-height:0.5in;justify-content:flex-end;position:relative;"></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;"/>
  <div style="z-index:2;min-height:0.5in;position:relative;"></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:9.35pt;text-align:center;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">SIGNATURES</span></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:9.35pt;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.</span></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:6%;box-sizing:content-box;"/>
     <td style="width:44%;box-sizing:content-box;"/>
     <td style="width:4%;box-sizing:content-box;"/>
     <td style="width:46%;box-sizing:content-box;"/>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:4.3pt;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Onto Innovation Inc.</span></p></td>
    </tr>
    <tr style="word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Date:</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">October 10, 2025</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">By:</span><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;border-bottom:0.25pt solid;padding-right:0in;"><p style="font-size:10pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">/s/ Yoon Ah Oh</span></p></td>
    </tr>
    <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;">
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</span></p></td>
     <td style="padding-top:0.01in;padding-left:0in;vertical-align:top;padding-bottom:0in;padding-right:0in;"><p style="font-size:10pt;margin-top:0.7pt;font-family:Times New Roman;margin-bottom:9.35pt;text-align:left;"><span style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Senior Vice President, General Counsel &amp; Corporate Secretary</span></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><span style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</span></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;min-height:0.5in;justify-content:flex-end;position:relative;"></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;"/>
 </body>
</html>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-2.1
<SEQUENCE>2
<FILENAME>onto-ex2_1.htm
<DESCRIPTION>EX-2.1
<TEXT>
<!-- DFIN ActiveDisclosure (SM) HTML Document - http://www.dfinsolutions.com/ --><!-- Creation Date :2025-10-10T08:38:41.0761+00:00 --><!-- Copyright (c) 2025 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<html>
 <head>
  <title>EX-2.1</title>
 </head>
 <body style="padding:8px;margin:auto!important;z-index:0;-webkit-text-size-adjust:100%;position:relative;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;margin-left:0;margin-right:0;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Execution Version</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;margin-left:0;margin-right:0;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Exhibit 2.1</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">AMENDMENT TO EQUITY PURCHASE AGREEMENT</font></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">This AMENDMENT (this &#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Amendment</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), dated as of October 9, 2025, to the EQUITY PURCHASE AGREEMENT, dated as of June 27, 2025 (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Purchase Agreement</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), by and among Semilab USA LLC, a Florida limited liability company (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Company</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), Semilab International Zrt., a Hungarian private company limited by shares (&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Seller</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), Semilab Zrt., a Hungarian private company limited by shares (&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Semilab Hungary</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;, and together with Seller, the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Seller Parties</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;) and Onto Innovation Inc., a Delaware corporation (&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Buyer</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;). Capitalized or other terms used and not defined herein but defined in the Purchase Agreement shall have the meanings ascribed to them in the Purchase Agreement.</font></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">WHEREAS, each of the Seller Parties and Buyer desires to amend the Purchase Agreement, Disclosure Schedules, and certain other Transaction Documents to remove the Fourier-Transform infrared spectroscopy reflectometry systems (EIR) product line (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">EIR Product Line</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;) by removing any purchase orders, accounts receivable, accounts payable, inventory, Contracts, Intellectual Property, or any other assets or liabilities exclusively related to the EIR Product Line (collectively, the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">EIR Assets and Liabilities</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;) from the scope of the transactions contemplated by the Purchase Agreement.</font></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">WHEREAS, the Seller Parties and Buyer may amend the Purchase Agreement pursuant to Section 8.9 thereof, which provides that the Purchase Agreement may be amended by a written mutual agreement executed and delivered by Buyer and the Seller Parties.</font></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">NOW, THEREFORE, in consideration of the representations, warranties, covenants and agreements contained herein, and other good and valuable consideration, the receipt, sufficiency and adequacy of which are hereby acknowledged, the parties hereto agree as follows:</font></p><div class="item-list-element-wrapper" style="margin-left:3.333%;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:1.241375029741277%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">1.</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Acknowledgement</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">.  The Seller Parties and Buyer acknowledge and agree that notwithstanding anything in the Purchase Agreement (including any Exhibits or Schedules thereto), Transaction Documents, or Disclosure Schedules (including any Annexes thereto) to the contrary, (i) the EIR Product Line and the EIR Assets and Liabilities are excluded from the scope of the transactions contemplated by the Purchase Agreement and shall not be acquired or assumed by Buyer or the Company, and all such assets and liabilities shall be retained by the Seller Parties and their Affiliates; and (ii) the Disclosure Schedules (including any Annexes thereto) and Interim Financial Statements were prepared prior to the removal of the EIR Product Line and the EIR Assets and Liabilities from the scope of the transactions contemplated by the Purchase Agreement, and that any disclosures exclusively relating to the EIR Product Line and the EIR Assets and Liabilities included in the Disclosure Schedules (including any Annexes thereto) are for informational purposes only.</font></div></div><div class="item-list-element-wrapper" style="margin-left:3.333%;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:1.241375029741277%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">2.</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Seller Party Covenants</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">.  Seller and Semilab Hungary shall not sell, assign, transfer or convey any EIR Assets and Liabilities to the Company or Buyer and shall cause the Company, in accordance with the terms, conditions, and requirements of Schedule II to the Purchase Agreement, to transfer to Seller, Semilab Hungary or their Affiliates (other than the Company) all EIR Assets and Liabilities owned by the Company prior to the Closing.  Prior to the Closing, Seller, Semilab Hungary, and the Company shall terminate any Contract previously entered into, but not consummated, that provides for the sale, assignment, transfer, or conveyance of any EIR Assets and Liabilities from Seller Parties or their Affiliates to the Company.</font></div></div><div class="item-list-element-wrapper" style="margin-left:3.333%;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:1.241375029741277%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">3.</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Amendments</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">. The parties hereto agree to the following amendments to the Purchase Agreement:</font></div></div><div class="item-list-element-wrapper" style="text-indent:6.667%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:2.4%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">(a)</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The following defined terms in Section 1.1 of the Purchase Agreement shall be amended and restated in their entirety as follows: </font></div></div></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="margin-left:60%;text-indent:16.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left; margin-right:0;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">		</font><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">2</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="margin-left:6.667%;text-indent:7.143%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201c;&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Base Cash Purchase Price</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d; means $432,310,000.&#x201d;</font></p><p style="margin-left:13.333%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201c;&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Business</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d; means the business of manufacturing, marketing, developing, testing and selling the following noncontact metrology product lines for the semiconductor industry conducted by the Seller Parties and their respective Affiliates: (i) surface voltage metrology systems for film analysis and substrate testing (FAaST), (ii) corona noncontact capacitance voltage (CnCV), and (iii) model-based infrared reflectometry systems which may include the spectroscopic ellipsometry systems (MBIR and SEIR).&#x201d;</font></p><p style="margin-left:13.333%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201c;&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Company Intellectual Property</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d; means all Intellectual Property owned or purported to be owned by or licensed to the Company or otherwise used in the Business, which, for the avoidance of doubt, shall not include any Intellectual Property exclusively associated with the Fourier-Transform infrared spectroscopy reflectometry systems (EIR) product line.&#x201d;</font></p><p style="margin-left:13.333%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201c;&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Stock Consideration</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d; means 641,771 shares of Buyer Common Stock, subject to adjustment as provided in Section 2.8.&#x201d;</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p><p style="margin-left:13.333%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201c;&#x201c;</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Target Working Capital Amount</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d; means $32,054,875.&#x201d;</font></p><div class="item-list-element-wrapper" style="text-indent:6.667%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:2.4%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">(b)</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The penultimate sentence of Section 4.13(a) of the Purchase Agreement shall be amended and restated in its entirety as follows: </font></div></div><p style="margin-left:13.333%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201c;Each party hereto agrees to use reasonable best efforts to make an appropriate filing pursuant to the HSR Act with respect to the transactions contemplated by the Transaction Documents on or before October 10, 2025, and to supply as promptly as practicable to the appropriate Governmental Entity any additional information and documentary material that may be requested pursuant to the HSR Act, including using reasonable best efforts to substantially comply with any Request for Additional Information and Documentary Materials in sufficient time to allow for the consummation of the Transaction in advance of the Outside Date.&#x201d;</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p><div class="item-list-element-wrapper" style="text-indent:6.667%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:2.4%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">(c)</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Schedule I (Accounting Principles, Schedule I-A (Closing Working Capital Example), and Schedule II (Pre-Closing Reorganization) shall be amended and restated in their entirety by replacing such schedules with Schedule I, Schedule I-A and Schedule II attached hereto, respectively. </font></div></div><div class="item-list-element-wrapper" style="text-indent:6.667%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:2.4%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">(d)</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Exhibit A (Form of Restrictive Covenant Agreement), Exhibit B (Form of Transition Services Agreement), and Exhibit F (Form of Manufacturing Agreement) shall be amended and restated in their entirety by replacing such exhibits with Exhibit A, Exhibit B, and Exhibit F attached hereto, respectively. </font></div></div><div class="item-list-element-wrapper" style="text-indent:6.667%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:2.4%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">(e)</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Part 3.2(c) of the Disclosure Schedule, Part 4.11 of the Disclosure Schedule, and Part 5.2(g) of the Disclosure Schedule shall be amended and restated in its entirety by replacing such schedule with Part 3.2(c) of the Disclosure Schedule, Part 4.11 of the Disclosure Schedule, and Part 5.2(g) of the Disclosure Schedule attached hereto.</font></div></div><div class="item-list-element-wrapper" style="text-indent:3.333%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:3.333%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:1.2%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">4.</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Effect of Amendment</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">.  Except as specifically provided herein, all of the terms, conditions, obligations, covenants and agreements of the Purchase Agreement shall continue in full force and effect in accordance with their respective terms after the execution of this Amendment. From and after the date hereof, any reference to the Purchase Agreement shall be deemed a reference to the Purchase Agreement as amended hereby. Notwithstanding the foregoing, references to the date of the Purchase Agreement and </font></div></div></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="margin-left:60%;text-indent:16.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left; margin-right:0;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">		</font><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">3</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><div class="item-list-element-wrapper" style="font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:3.333%;text-align:justify;"><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">references in the Purchase Agreement to &#x201c;the date hereof,&#x201d; &#x201c;the date of this Agreement&#x201d; and terms of similar import shall in all instances continue to refer to June 27, 2025.</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">  </font></div></div><div class="item-list-element-wrapper" style="text-indent:3.333%;font-size:0;margin-top:0;justify-content:flex-start;margin-bottom:12pt;min-width:3.333%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:1.2%;word-break:keep-all;text-indent:0;display:inline-flex;justify-content:flex-start;">5.</font><div style="display:inline;"><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Miscellaneous</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">. The provisions of Sections 8.1, 8.2, 8.3, 8.4, 8.8, 8.9, 8.11, 8.12 and 8.13 of the Purchase Agreement are incorporated by reference into this Amendment and shall apply </font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">mutatis mutandis</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> to this Amendment.  </font></div></div><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">[S</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">ignature Pages Follow</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">]</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:0.8in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">IN WITNESS WHEREOF, the parties hereto have caused this Amendment to be executed the day and year first above written</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:45.82%;box-sizing:content-box;"></td>
     <td style="width:6.66%;box-sizing:content-box;"></td>
     <td style="width:47.52%;box-sizing:content-box;"></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td colspan="2" style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">COMPANY</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td colspan="2" style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">SEMILAB USA LLC,</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">a Florida limited liability company</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">By:</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">_</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">/s/ Andrew D. Findlay</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">_______________</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Name: Andrew D. Findlay</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Title:   President</font></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:45.82%;box-sizing:content-box;"></td>
     <td style="width:6.66%;box-sizing:content-box;"></td>
     <td style="width:47.52%;box-sizing:content-box;"></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td colspan="2" style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">SELLER</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td colspan="2" style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">SEMILAB INTERNATIONAL ZRT.,</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">a Hungarian private company limited by shares</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">By:</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">_</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">/s/ Tibor Pavelka</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">_______________</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Name: Tibor Pavelka</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Title:   President &amp; CEO</font></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:12.28%;box-sizing:content-box;"></td>
     <td style="width:87.72%;box-sizing:content-box;"></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td colspan="2" style="padding-top:0in;text-indent:215.1pt;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">SEMILAB HUNGARY</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td colspan="2" style="padding-top:0in;text-indent:215.1pt;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">SEMILAB ZRT.,</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">a Hungarian private company limited by shares</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">By: _</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">/s/ Tibor Pavelka</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">________________</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;&#160;&#160;&#160;&#160;&#160;Name: Tibor Pavelka</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;&#160;&#160;&#160;&#160;&#160;&#160;Title: President &amp; CEO</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;text-indent:215.1pt;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">By:</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="margin-left:39.84%;text-indent:0;font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:0.8in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Signature Page to Amendment to Equity Purchase Agreement</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
   <table style="border-spacing:0;table-layout:auto;width:100.0%;border-collapse:separate;">
    <tr style="visibility:collapse;">
     <td style="width:45.82%;box-sizing:content-box;"></td>
     <td style="width:6.66%;box-sizing:content-box;"></td>
     <td style="width:47.52%;box-sizing:content-box;"></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td colspan="2" style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">BUYER</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td colspan="2" style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">ONTO INNOVATION INC.,</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">a Delaware corporation</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    </tr>
    <tr style="height:12pt;white-space:pre-wrap;word-break:break-word;">
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">By:</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
     <td style="padding-top:0in;padding-left:0.075in;vertical-align:top;padding-bottom:0in;padding-right:0.075in;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">_</font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">/s/ Michael Plisinski</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">_______________</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Name: Michael Plisinski</font></p><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Title:   Chief Executive Officer</font></p></td>
    </tr>
   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Signature Page to Amendment to Equity Purchase Agreement</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:0.8in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Schedule I</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Accounting Principles</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Intentionally omitted.</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:0.8in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:0.8in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Schedule I-A</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Closing Working Capital Example</font></p><h1 style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"></font>&#160;</h1><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Intentionally omitted.</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:0.8in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:8pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Schedule II</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pre-Closing Reorganization</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Intentionally omitted.</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:8pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Exhibit A</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Form of Restrictive Covenants Agreement</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Intentionally omitted.</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:8pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Exhibit B</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Form of Transition Services Agreement</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Intentionally omitted.</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:8pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:2;min-height:1in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div class="main-content-container" style="z-index:5;position:relative;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;text-decoration:underline solid;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Exhibit F</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Form of Manufacturing Agreement</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Intentionally omitted.</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <div style="z-index:2;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:1in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;margin-left:0;margin-right:0;"><font style="white-space:pre-wrap;font-size:8pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
 </body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>3
<FILENAME>onto-20251009.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2025-10-10T08:38:41.3764+00:00 -->
<!-- Copyright (c) 2025 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<xsd:schema targetNamespace="http://ontoinnovation.com/20251009" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:us-gaap="http://fasb.org/us-gaap/2025" xmlns:dei="http://xbrl.sec.gov/dei/2025" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:onto="http://ontoinnovation.com/20251009" xmlns:xlink="http://www.w3.org/1999/xlink">
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/instance"/>
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/linkbase"/>
  <xsd:import schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" namespace="http://xbrl.org/2005/xbrldt"/>
  <xsd:import schemaLocation="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd" namespace="http://fasb.org/us-gaap/2025"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/dei/2025/dei-2025.xsd" namespace="http://xbrl.sec.gov/dei/2025"/>
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation" id="Role_DocumentDocumentAndEntityInformation">
        <link:definition>100000 - Document - Document And Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbase id="lnk">
        <link:roleRef roleURI="http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation" xlink:href="onto-20251009.xsd#Role_DocumentDocumentAndEntityInformation" xlink:type="simple"/>
        <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:title="labelLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentType" xlink:label="dei_DocumentType"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityInformationFormerLegalOrRegisteredName" xlink:label="dei_EntityInformationFormerLegalOrRegisteredName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementIssuerTenderOffer" xlink:label="dei_PreCommencementIssuerTenderOffer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementTenderOffer" xlink:label="dei_PreCommencementTenderOffer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SolicitingMaterial" xlink:label="dei_SolicitingMaterial"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_WrittenCommunications" xlink:label="dei_WrittenCommunications"/>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CoverAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cover [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CityAreaCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">City Area Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Period End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentType_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Address Line One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, City or Town</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Postal Zip Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, State or Province</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Central Index Key</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Emerging Growth Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFileNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity File Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Incorporation, State or Country Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityInformationFormerLegalOrRegisteredName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Information, Former Legal or Registered Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityRegistrantName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Registrant Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Tax Identification Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_LocalPhoneNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Local Phone Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Pre-commencement Issuer Tender Offer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_PreCommencementTenderOffer_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Pre-commencement Tender Offer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_Security12bTitle_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Title of 12(b) Security</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SecurityExchangeName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Security Exchange Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SolicitingMaterial_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Soliciting Material</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_TradingSymbol_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Trading Symbol</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_WrittenCommunications_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Written Communications</link:label>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInformationFormerLegalOrRegisteredName" xlink:to="dei_EntityInformationFormerLegalOrRegisteredName_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementIssuerTenderOffer" xlink:to="dei_PreCommencementIssuerTenderOffer_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementTenderOffer" xlink:to="dei_PreCommencementTenderOffer_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SolicitingMaterial" xlink:to="dei_SolicitingMaterial_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_WrittenCommunications" xlink:to="dei_WrittenCommunications_lbl"/>
        </link:labelLink>
        <link:presentationLink xlink:role="http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentType" xlink:label="dei_DocumentType"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityInformationFormerLegalOrRegisteredName" xlink:label="dei_EntityInformationFormerLegalOrRegisteredName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementIssuerTenderOffer" xlink:label="dei_PreCommencementIssuerTenderOffer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementTenderOffer" xlink:label="dei_PreCommencementTenderOffer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SolicitingMaterial" xlink:label="dei_SolicitingMaterial"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_WrittenCommunications" xlink:label="dei_WrittenCommunications"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag" order="10010.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode" order="10130.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate" order="10020.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType" order="10000.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1" order="10090.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown" order="10100.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode" order="10120.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince" order="10110.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey" order="10040.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany" order="10050.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber" order="10060.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode" order="10070.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityInformationFormerLegalOrRegisteredName" order="10150.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName" order="10030.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber" order="10080.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber" order="10140.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementIssuerTenderOffer" order="10190.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementTenderOffer" order="10180.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle" order="10210.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName" order="10340.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SolicitingMaterial" order="10170.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol" order="10220.0" priority="2" use="optional"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_WrittenCommunications" order="10160.0" priority="2" use="optional"/>
        </link:presentationLink>
      </link:linkbase>
    </xsd:appinfo>
  </xsd:annotation>
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>5
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.25.2</span><table class="report" border="0" cellspacing="2" id="id2">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Document And Entity Information<br></strong></div></th>
<th class="th"><div>Oct. 09, 2025</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Cover [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">8-K<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Oct.  09,  2025<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">Onto Innovation Inc.<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000704532<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">001-39110<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">DE<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">94-2276314<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">16 Jonspin Road<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Wilmington<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">MA<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">01887<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">(978)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">253-6200<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityInformationFormerLegalOrRegisteredName', window );">Entity Information, Former Legal or Registered Name</a></td>
<td class="text">Not applicable<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_WrittenCommunications', window );">Written Communications</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SolicitingMaterial', window );">Soliciting Material</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_PreCommencementTenderOffer', window );">Pre-commencement Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_PreCommencementIssuerTenderOffer', window );">Pre-commencement Issuer Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock, $0.001 par value per share<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ONTO<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NYSE<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityInformationFormerLegalOrRegisteredName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Former Legal or Registered Name of an entity</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityInformationFormerLegalOrRegisteredName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementIssuerTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 13e<br> -Subsection 4c<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementIssuerTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 14d<br> -Subsection 2b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SolicitingMaterial">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 14a<br> -Subsection 12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SolicitingMaterial</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_WrittenCommunications">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 425<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_WrittenCommunications</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>6
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>7
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
.report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

.report table.authRefData a {
	display: block;
	font-weight: bold;
}

.report table.authRefData p {
	margin-top: 0px;
}

.report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

.report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

.report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

.report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
.pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
.report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

.report hr {
	border: 1px solid #acf;
}

/* Top labels */
.report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

.report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

.report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

.report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

.report td.pl div.a {
	width: 200px;
}

.report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
.report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
.report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
.report .re, .report .reu {
	background-color: #def;
}

.report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
.report .ro, .report .rou {
	background-color: white;
}

.report .rou td {
	border-bottom: 1px solid black;
}

.report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
.report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
.report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

.report .nump {
	padding-left: 2em;
}

.report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
.report .text {
	text-align: left;
	white-space: normal;
}

.report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

.report .text .more {
	display: none;
}

.report .text .note {
	font-style: italic;
	font-weight: bold;
}

.report .text .small {
	width: 10em;
}

.report sup {
	font-style: italic;
}

.report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>9
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.25.2</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>1</ContextCount>
  <ElementCount>23</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>0</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>0</UnitCount>
  <MyReports>
    <Report instance="onto-20251009.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>100000 - Document - Document And Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document And Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File doctype="8-K" isOnlyDei="true" isUsgaap="true" original="onto-20251009.htm">onto-20251009.htm</File>
    <File>onto-20251009.xsd</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy items="23">http://xbrl.sec.gov/dei/2025</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>false</HasPresentationLinkbase>
  <HasCalculationLinkbase>false</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>11
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "version": "2.2",
 "instance": {
  "onto-20251009.htm": {
   "nsprefix": "onto",
   "nsuri": "http://ontoinnovation.com/20251009",
   "dts": {
    "inline": {
     "local": [
      "onto-20251009.htm"
     ]
    },
    "schema": {
     "local": [
      "onto-20251009.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd",
      "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd",
      "https://www.xbrl.org/dtr/type/2024-01-31/types.xsd",
      "https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd",
      "https://xbrl.fasb.org/srt/2025/elts/srt-roles-2025.xsd",
      "https://xbrl.fasb.org/srt/2025/elts/srt-types-2025.xsd",
      "https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd",
      "https://xbrl.fasb.org/us-gaap/2025/elts/us-roles-2025.xsd",
      "https://xbrl.fasb.org/us-gaap/2025/elts/us-types-2025.xsd",
      "https://xbrl.sec.gov/country/2025/country-2025.xsd",
      "https://xbrl.sec.gov/dei/2025/dei-2025.xsd",
      "https://xbrl.sec.gov/stpr/2025/stpr-2025.xsd"
     ]
    }
   },
   "keyStandard": 23,
   "keyCustom": 0,
   "axisStandard": 0,
   "axisCustom": 0,
   "memberStandard": 0,
   "memberCustom": 0,
   "hidden": {
    "total": 2,
    "http://xbrl.sec.gov/dei/2025": 2
   },
   "contextCount": 1,
   "entityCount": 1,
   "segmentCount": 0,
   "elementCount": 24,
   "unitCount": 0,
   "baseTaxonomies": {
    "http://xbrl.sec.gov/dei/2025": 23
   },
   "report": {
    "R1": {
     "role": "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation",
     "longName": "100000 - Document - Document And Entity Information",
     "shortName": "Document And Entity Information",
     "isDefault": "true",
     "groupType": "document",
     "subGroupType": "",
     "menuCat": "Cover",
     "order": "1",
     "firstAnchor": {
      "contextRef": "C_ee245b72-bc7e-4b47-bed4-f334348856b8",
      "name": "dei:DocumentType",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "span",
       "h2",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "onto-20251009.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "C_ee245b72-bc7e-4b47-bed4-f334348856b8",
      "name": "dei:DocumentType",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "span",
       "h2",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "onto-20251009.htm",
      "first": true,
      "unique": true
     }
    }
   },
   "tag": {
    "dei_AmendmentFlag": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "AmendmentFlag",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Amendment Flag",
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission."
       }
      }
     },
     "auth_ref": []
    },
    "dei_CityAreaCode": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "CityAreaCode",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "City Area Code",
        "documentation": "Area code of city"
       }
      }
     },
     "auth_ref": []
    },
    "dei_CoverAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "CoverAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Cover [Abstract]",
        "documentation": "Cover page."
       }
      }
     },
     "auth_ref": []
    },
    "dei_DocumentPeriodEndDate": {
     "xbrltype": "dateItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "DocumentPeriodEndDate",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Period End Date",
        "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD."
       }
      }
     },
     "auth_ref": []
    },
    "dei_DocumentType": {
     "xbrltype": "submissionTypeItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "DocumentType",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Type",
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressAddressLine1": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityAddressAddressLine1",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, Address Line One",
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressCityOrTown": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityAddressCityOrTown",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, City or Town",
        "documentation": "Name of the City or Town"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressPostalZipCode": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityAddressPostalZipCode",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, Postal Zip Code",
        "documentation": "Code for the postal or zip code"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressStateOrProvince": {
     "xbrltype": "stateOrProvinceItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityAddressStateOrProvince",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, State or Province",
        "documentation": "Name of the state or province."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityCentralIndexKey": {
     "xbrltype": "centralIndexKeyItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityCentralIndexKey",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Central Index Key",
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK."
       }
      }
     },
     "auth_ref": [
      "r1"
     ]
    },
    "dei_EntityEmergingGrowthCompany": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityEmergingGrowthCompany",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Emerging Growth Company",
        "documentation": "Indicate if registrant meets the emerging growth company criteria."
       }
      }
     },
     "auth_ref": [
      "r1"
     ]
    },
    "dei_EntityFileNumber": {
     "xbrltype": "fileNumberItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityFileNumber",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity File Number",
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityIncorporationStateCountryCode": {
     "xbrltype": "edgarStateCountryItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityIncorporationStateCountryCode",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Incorporation, State or Country Code",
        "documentation": "Two-character EDGAR code representing the state or country of incorporation."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityInformationFormerLegalOrRegisteredName": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityInformationFormerLegalOrRegisteredName",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Information, Former Legal or Registered Name",
        "documentation": "Former Legal or Registered Name of an entity"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityRegistrantName": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityRegistrantName",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Registrant Name",
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC."
       }
      }
     },
     "auth_ref": [
      "r1"
     ]
    },
    "dei_EntityTaxIdentificationNumber": {
     "xbrltype": "employerIdItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "EntityTaxIdentificationNumber",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Tax Identification Number",
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS."
       }
      }
     },
     "auth_ref": [
      "r1"
     ]
    },
    "dei_LocalPhoneNumber": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "LocalPhoneNumber",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Local Phone Number",
        "documentation": "Local phone number for entity."
       }
      }
     },
     "auth_ref": []
    },
    "dei_PreCommencementIssuerTenderOffer": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "PreCommencementIssuerTenderOffer",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Pre-commencement Issuer Tender Offer",
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act."
       }
      }
     },
     "auth_ref": [
      "r3"
     ]
    },
    "dei_PreCommencementTenderOffer": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "PreCommencementTenderOffer",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Pre-commencement Tender Offer",
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act."
       }
      }
     },
     "auth_ref": [
      "r5"
     ]
    },
    "dei_Security12bTitle": {
     "xbrltype": "securityTitleItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "Security12bTitle",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Title of 12(b) Security",
        "documentation": "Title of a 12(b) registered security."
       }
      }
     },
     "auth_ref": [
      "r0"
     ]
    },
    "dei_SecurityExchangeName": {
     "xbrltype": "edgarExchangeCodeItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "SecurityExchangeName",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Security Exchange Name",
        "documentation": "Name of the Exchange on which a security is registered."
       }
      }
     },
     "auth_ref": [
      "r2"
     ]
    },
    "dei_SolicitingMaterial": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "SolicitingMaterial",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Soliciting Material",
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act."
       }
      }
     },
     "auth_ref": [
      "r4"
     ]
    },
    "dei_TradingSymbol": {
     "xbrltype": "tradingSymbolItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "TradingSymbol",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Trading Symbol",
        "documentation": "Trading symbol of an instrument as listed on an exchange."
       }
      }
     },
     "auth_ref": []
    },
    "dei_WrittenCommunications": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2025",
     "localname": "WrittenCommunications",
     "presentation": [
      "http://ontoinnovation.com/20251009/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Written Communications",
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act."
       }
      }
     },
     "auth_ref": [
      "r6"
     ]
    }
   }
  }
 },
 "std_ref": {
  "r0": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "12",
   "Subsection": "b"
  },
  "r1": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "12",
   "Subsection": "b-2"
  },
  "r2": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "12",
   "Subsection": "d1-1"
  },
  "r3": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "13e",
   "Subsection": "4c"
  },
  "r4": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "14a",
   "Subsection": "12"
  },
  "r5": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "14d",
   "Subsection": "2b"
  },
  "r6": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Securities Act",
   "Number": "230",
   "Section": "425"
  }
 }
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>12
<FILENAME>0001193125-25-236464-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001193125-25-236464-xbrl.zip
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M1)ZV:>XA->ZQ^-9Z6:C][EW4>'^D;1]><;"H<,6E/JM6FO&<G4V%CW'.@$6
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M>-AWM/X TQY-T]&X[1B:*0:!*4+#\K'\9H4<O ]_GF3GZ>7+1F!_BV)X-2K
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MNR1-:=>]#XL\C)Z>XS#H=NAF^45Z:YQ@>?L=A6$LKK0@RN1:X>Y1.4EVJVM
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MK@-RH 2NM,SFH*H^H0O 4B"_E/D:ZE!GZJH 8AH!) FM"-;\BX)5 JRS'($
MDPASE=&E/DFG2(YE0@B1WQ417F$O0R9J6@LU6)2%*_?=KQ=Z-)8@7Y9(K(R)
M.IL,FU'Z^ABD6+54^+#&"&V?7HHXI@ /Y9!-.!@KF4I@P3P0W($&6PDS0(#;
MBC1#\Q'#0GPA]>42=ZUE\AD5, 478%VA>ZI 58R1\U"P,<_ ^:DVL^N4#MS5
M5@44R%=$):#7:''FJ7GJD 70NSXE/)=8?A%'DO+5]O'-_"[I%2<G4_(RD9<Q
MK?2,!1&>@UX7K\&4575:FC>9CLM2!?P.)W?!,TQAIB2_-&M5DF91_ED.B;7$
M5' AR6&BDO>D:*!\&S%+VYG:C5*$I,C2N,O.:!M9#E/)DP[P[WRE8B"Q@K(0
ML3"(;,U)FHDE!:]+TMN;D%?E(8U\[JH:E,"?5:4RLL@6$WIAK$N.)8-4DU07
M+WD<6+*50="NM<6E8".,9B32@J;,X&)&@\"(9"EWD/'YK",/QPA+65\UH@,X
MZBK5*LT<I4 YF;2N8<)+GZBRKUT[E=$H:'9CK7*S')@PR=4/&A5$0^17Q'BM
M\)"V^&L426&&R[\\RZ:!P%:BC1(3 @@/#^F4XFE>5E3S-J9O%EA;O0N45;?R
MT[P :'U@KY&08..[)*<SU9%>J8JLJKAL +3+@*ZB&"4^X!4,R!A4M50B=;Y0
M<)OT::[I G_0RDF4T4RK9+$F/E)9B##*>/WZFO::5R#43]KB<Y<8./)QGD*R
M'8U-Z\7]<20NB"D;:7"(,9;/$CP$ACZ93U8F["E4!#=@C9)O?9],$*EX*0OP
M@@+KN/"RI'.$^;M9I*H"VP4=U_H4%VE,@,9XUV&GP8*JF(-?T?DS8#7M,IGJ
M0C/$0D-P-OW.W"KH@.9"E>SCG[)D9EZ>T:I]ER6X"0D/RLE0^C'.Q25FP,O/
MY]G,::4C2#A%((-H;G,Q)[<&8"HP451U'093+C'O!I^#_-,F6)0##A3'PV:1
M;*.+*(8>,JJ3A 4%11WY\&(DTGH:S1$Z:@GG(@T!D@Q-Q$=K%N-1/=+M:..R
MP*H@V0=V[\\J9.XJN5TE1\.\ ,RLK/<\ 7I0;'+W1#(KC),FLBAB3IRR> 8!
M0QUU7=[>)23J,D9U%H6ZB ()BHJ,L9@S +F)"9R@N'PR?HEUEEL72CQ>9RQB
M^48U8&4LJ(?XYQCEXV<Q0SLS1]%7K6.4*#TAPR5XHH/BU(:900&2B/X4( /2
MF4#QU#1.\!?&/D>13WGL206#)#EOGL;;'(<:)"I57N&;.%SJ='Q=?ZG2ON+9
MG89F(!!$0CWT!#:D+^V:2![9($UU91$BZY!-A5I6FGY /[1J\PXO!:=9U.*I
MYE70=1=1EI+FN_X=S"BA(Z&6V91*%H"D+V!U1F-->FYS('"6E3F[ R!\;HI,
MC_N?,6Y057(!"8/7)<B8!KAD82VI1QHY%R,%8AB7:#C-]6!EQH,#$*'VS@%H
M5 -WHEG2K"PNDQPE35:D%>)%17K I7^4,@=9+@8I$K!NT)PCUJO)"[N="("W
MADH:^]<PV^@3UK2@<R\*>=ECC!7':!FBR0"B!J0)Q@+R-KVC 8QICG2NY;7N
M%Z8F2G191G'J0;<D=EB$M^\H1V@NPN4[Y9B@-PMB"=6W%%"1N,&#:XQ\&T.V
M;/]*#"/:FW=BQJ"\8B(3M+@34A4W8!6@X3>8K V(P# "_LFQHFM6*_DE4JBB
M:.&/DS1.41]W&UGCUXZ;(%\OJ$7LO#ZG$JIDD5^SG<A4YA<<=YEC46F^1?CW
M9,;\0DS!T/%J4"5&*?U=YL\>"%^=L#&@K7&[I2T7*UL;\029\JC25>?UJ3!O
M61)^FQ^#/@/5-:?+I^"KN$C3Q6TGWONH6 HV*K%,LQ"B51&D_'\E2CL-ND#M
M=$$:O15SR)2))>%KA\R#5$B_C0/93U1EU/RJ5#0<I@%73N_BI&_,L[XCM;J9
MK:LL?"*&F%]VV;&(Y.K(:09XFA]:,;51=GMD*9F[&I1:'U0DU5"\=^5]DR*?
MYT3+"MP<7!^TI4"W*Y20[Z')(HFFT9BW0DF\3F^N9@2OOIIBKLV^PF9?X9GV
M%=0MV*_H'K6C'X[WSG\]/5R^5?!<6%FG0H-/"_5S2OI+27G?^ACY8>N8UZ!$
MPY27.9UE(P\O0;DN0P5X8)-4QVAH>6+,X[ R/BA13S5 =[K$9#GJ#OAKG&88
M8FAF-J_O-79W9X@LN2CN,>DHC_KF:?DKZUP*L+ER88.T#=)>/]+L[F)ZXNV(
MD^V?H2+D_KA=EME]_WJ/C3S]"JE\@[0-TC9(^W/<FO@\>NUE\W\/P/,9O@)J
M7F\L5@5@ABXKP#8(?2)"OY\-OU"J]QI<M_MG6,"=?(?]*\6CB,;L9/QU2OY7
MHH$W2-L@[:M$6K?_( &ZVM#^_;8L1!*E&?M?/,G[4R9P6Q]KSW]0!S7MIV62
MBYA]RR?37?BE3H["$#YF*&6S33'35[?I^';'2X/9^[^\W1D7D_C]_P-02P,$
M%     @ #TA*6RR&%E:H"   TF$  !$   !O;G1O+3(P,C4Q,# Y+GAS9.U<
M;V_:.!Q^?Y_"E[W9= L)=-U6-#IQ[7I"U[55Z733G4Y32 Q$"S;G)"U\^[.=
M./]P0@I- @AI6FGR\^/GB7]V[*<VGSXO9@YXA,2U,>HI[9:N (A,;-EHTE.^
M#=7^\&(P4#Z?__+I5U4%EU>#&W #GT#?].Q'>&F[IH-=GT#P>OCU#?C^^_TU
M&)I3.#/ )3;]&40>4,'4\^9=37MZ>FI98QNYV/$]6IW;,O%, ZH:@E\0:+#K
MX-+P(.AV],ZIVM;IOP?]8_?D8_==NW7RX?V[WW2]J^N)8GB^)/9DZH'7YAO
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M+POP&+0[KT=O@$"M@WG2E-F0O8 " JORP6G5L-F4>@0$!%*5O%-VSJ:Y$F"
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M'] _+5\(X/$I*#/N=2AN?.9=,4^W$QFQQ@L0I6 7,977!WLN;N)F428*,P'
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MU'<(ZA.=N_54IDFEC"?P)?1!66,W(5BX!(.]&DV4*Q4R$BS@F!N",RKCZX$
MRA$QAQZ0\@?\&>FBED+2H:DF3.)4PF@8&0H_ <Q1Z$M62(6]@'L":(_ZHYCK
MAN.T!YW !$PVU(VC-KWL;E;TA +(D0AI<90N!>;Q1&5.LJ=M'(:'OVU6LGD(
MN"\0'O.KF'CPQN5>LRN\]*PP%A28C+HFUK@TC+L$21_%TZ5A)Y^/+W1Z$(O$
MK%U9.[N2)0MG%HV5V-A@[#BSSR;#"JJHIGBDJ6&#.#-/O:JJ-XB4XG%Y6R$Y
MK1*[-QQ<?AJ/IYXR^VM*>"JYR:%#P;TLR>F)M(<5&GGN/-.WN22>F#,#&"I<
MKN+?/..]Z-I.J\-KI\.7B7"O,;4_+ADJL>9^V*E7]O;JV>H:T!H]'00J&(B0
MJ,%@D5/OWR#.JHY:+<#750)Q-@OA%1--#6?_CEB78>3$ZMBZZ%@7",T2\EW(
M:X1P9@4':0=8DETFF9L."R$JK.WN5/;W=F=:?IOR?\64?V^U4OX1"U,_X3@G
M3+#^E1G4DYGA':>^O4$WGY/SQZ*X!V?\K47-+&D'ER9%JM2D.#6HYO^PM +$
M-H8@$RN+>T!MPOJ )/7T8$"O$9X2T'2 I!+1)P:Q:.2*U>S(T*^7%[BWD,:F
M)E+.SOVPD&SV.B:LJI;0)^@.RS<BJ->RG0CT E$  U&DX#%Z_R!*LN_8G*M&
M97I1',0O8@@DQ,> G>Z 3"6Z4@6G 4P16*$D3!?.FWYAT0=*N<0*/57[8(KQ
ML<X$Z(?E>;-I4R'C:C2,&*[N([W*#&#A."B%7IT/?Q1QL9\7^EDJT&B/^WP\
MU><OA3Z?F#ZK6;B\3!SZ" *FD!0J4QZYY!4>A=KV(I>P!,<;9J$-GCU+$X28
M:B^H\@,NZ]I>T;6YJ^/:QL5B9*.MU]BAXIY+4&4>J669XTNJ;;)A2K'N@,'.
M+0459B9+5ZQ!VSB'$62W73 AKVC(_U2:M_GHB7"U>A#HZ&)CJN(YSHMA]2+Z
M_,E3/9_N%DT2BC^-TZ@4TI_^R)GI<ZU2O:)2>:NC5-D>8Z N1YBT @]R 2(M
MN4ZN9P6Q8VP(6I/=\WE\C_)'RO4!RI1#[D)WBK>@1&>W'8UO.RE./11N6("N
ML6SMAE*U?)B%WD_WRFK9:FD96QTMPPDLLNTT<)=-@]%FK)&HJ(DN#,_J]UZ%
M8JNNW(46K^YK\9&!W'R/I;7HU88QI9K/+R<NRMZ=0'1!NFC:+9,NUIW&4G1Q
M9WW*BCO]/H;+((REW!O0(>"Q7!:I'#NZ)P[!HXI+\X1[OF[9SQ>BS5B.(7H@
MDMG*Z+FKH7^4(L*.\3!E:$KZ*1R H-75:\:8)N3L!2*34_BZ(E65!:K'L7RW
M6/5\W&LRXX5#CG %@NIF?CUN<TBRI?L8DTO6AU_XP+F%U6/3Z.$!:.Y!=P'5
M,U.J5VX[Y'1JG:FNBI#L2JC"B;S5O,I;=7<^97%LMG#6%L[:PEE;./N8WFPO
MMW#V4?CJ9<%4Z?%_P0?,WWP O$,V3S#MU/+)PCL7Y XR:R:_5.7DE6.%:V*.
MBQ ET5OI&]^'KEG]B54-6SSVYFK;,K/:<F+?8*=,6(@L-B:W<<"SXX#=]8D#
M3B ,9;Y/0R;24E7SFA6&B/9C-8LWGMF-R;Y3K\!' S^V\6,'/_;QXR-^U-7I
M>D-9!_BR?1\.E0CKLPU&]0SA&"+C*N0I;%Y8*4[51. +D>V)KU<(4MP9*L9-
MNA"YEXK)Y YQG=G6[@6P=DE\Z/]>EEN<@&(TP:S5.0#VF!RIBH@RR=3_+?&=
M*P]9X/2:<=CR-\V[&[0\<OBUEPA#;>K I@Z>GCJH.?OE>1V6TK%%,G-QD?@/
M%'"QZUA?;!O0,BU:/3XEWX^[IYW+2Z*VA#T[FKEIIMI=7>U:Y$UC5;W6)-^/
M50?4>J/.$:.X0$S&@&A[N'>WV<ZU3,Z\6$$%<D4.$E6Z9GIEM! [@BV!WN#9
M*IASD1J380+!6LVIO6^9ZW&K:!K%K!GCYG: ^;6EP-9S&X11AWY/33.[/+L*
M+O-R95/-[^PZ^XWW1?N0R;LQ$%N)-^]>E.4GWKJSY^P^[+'P3=X98N;34/YG
M<K00.6OKB@=F46'"KJ+I-+^UO7)J>VAJATQB>:1OU RNO>-N"[<:XV;NG6-C
M&Z^"8YYJ&R<8"4(%;8<_OVN\6V<J/OGM=P];+7AV<MX^_?U'@'\UQ<3J;(F8
M877VB32][)P<?VM_SM\(]QQP\8Q%;JM(N@>\.V^M+-_*#\":[C(R8]TIMU";
M\WG47"N5M -X[0%8/7P*'?]_F8O1']2#K7B+M$-/ CF^./B& ,^GS]J!Y6'C
MGORW-ECNE :L.9^>*S^^+D]\&"!N$LYP3>:XFG@V,((OF*I[@=1Y>;+C-G]I
M\Y=KX\AM+F0!^<O+SK=OG8OUA'M694O$#*NRSTQ?'I]V.Q>G[>[QV6G[&_G7
M1=>QF<S'9#+U6V$X#?'E,D.LZ#89S#RWV1N9+=C6RARN_ "L/2\C,]:=<C:G
MN<XV9>4'8/5P=7.:7=X3N-7ZD/G7U.8SGY7/G$G+E1_;W5PF^3L-HA8Y[)S9
MK.;J9#7K#:>Q_\34Y/Z>L_>ZJ<D'1.O%DNA&?=?!LMNE>IUB&?KV1V=_9W)Y
M?&U:Y%Y;W9^:E=,Q_]=?3W]I7\RN+BP+)58OWK-R_<*IJ]=,5JTE89^?S2H+
M6987V95EA(M.)! ;Q,R)8M:2XUK"[_]\:"CT9@FD/TU4]>B8ZF72S19R+#/3
M6I;!KK^_LR.T([3IZL5'-#;7MXSM5-[V9B)ZFXDUW$[D<9L%/(B'JN7';U9T
M.;%;$6Z&,+$S0N>/%!?3W=T4K.0;E#QU;]-E::W=GN3E]B6S4SVV@/U-@#E;
M#5O^J;+/O_YNZ]>MQEJ-+6L0>W;:/2/'IZ=GOZG:=?AZ.)X,7/E*'4J^ !:[
MP1U\L_U[G_FR\?(7YMMJ3&NR5X$9ZTXY6Z*^SC9EY0=@]7!U2]1/N#N@S"?G
M/H]Y&%]S6Z;^K#+UN?1<^?'EI>J' \[ZI*-?*#=DY Q?ML[DBDYAK?2TSIKN
M$5^>-U"LZ:2.W77^+4_K/"5/^X@71BV._/G+BH]?JC"@=/-@*R(>2R%&VW5%
MBJ_/NR+GDH<NC_P?;]E@)>&ET>.B1WZLOH"14>]@%@&^*,)S;+G,2[Q]YT5<
MI\5!%@=9'/0D'%1M6_]7;@%9"C$.?= 8@$'?A;S&OX<TPE"6=&YI *"H2*5!
MO60)EL51P0PSDXQ!W6*BUT.':YU7L_AOQ>SWHK'3_MO"P24J\E;\6AF9MC#X
M56"PS0>67#Z60HQS>%R&A"^8D%<TY'].E.%9<7B[ -A.MEI(:"&AA82O+=,6
M$KX@).S<#GB/)\2F14LN'4LAQI&0 1%] (-Q(KFKJM$.Q9"%-$SBV<4X5C;>
M)CHL6WITG;B^UJE@B_I73SXMZK>HWZ+^]4?]GRVR*[=T+!7U=R4-M=Z02R:'
MW&6O@/G?.O:SB-^BX)( !HN"+0JV*-BBX+>&@H\L"BZW="P5!9_0,.U3-TDE
MED78G+=%P*5%P.O$=8OV+=HOE7Q:M(]H_V"K)[S1IY\.M@9)X'_Z#U!+ 0(4
M Q0    (  ](2EM"=I\B8"$  +WE   1              "  0    !O;G1O
M+3(P,C4Q,# Y+FAT;5!+ 0(4 Q0    (  ](2ELLAA96J @  -)A   1
M          "  8\A  !O;G1O+3(P,C4Q,# Y+GAS9%!+ 0(4 Q0    (  ](
M2ELWL/H!A!0  !D, 0 .              "  68J  !O;G1O+65X,E\Q+FAT
7;5!+!08      P # +H    6/P     !

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>13
<FILENAME>onto-20251009_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:dei="http://xbrl.sec.gov/dei/2025"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:xlink="http://www.w3.org/1999/xlink">
    <link:schemaRef xlink:href="onto-20251009.xsd" xlink:type="simple"/>
    <context id="C_ee245b72-bc7e-4b47-bed4-f334348856b8">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000704532</identifier>
        </entity>
        <period>
            <startDate>2025-10-09</startDate>
            <endDate>2025-10-09</endDate>
        </period>
    </context>
    <dei:EntityCentralIndexKey
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_37f6e8a7-9b4d-4028-bbef-76b99492b839">0000704532</dei:EntityCentralIndexKey>
    <dei:AmendmentFlag
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_0fe51dc4-ab76-4366-b9e3-215130fd21a3">false</dei:AmendmentFlag>
    <dei:DocumentType
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_fe7cbe3f-3cc8-4403-9488-f1123b8b9176">8-K</dei:DocumentType>
    <dei:DocumentPeriodEndDate
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_c84fbd69-76d2-442b-bf0e-c823ef9d2e62">2025-10-09</dei:DocumentPeriodEndDate>
    <dei:EntityRegistrantName
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_90b7564f-8b96-4eb7-84f3-9d8a30a5e67b">Onto Innovation Inc.</dei:EntityRegistrantName>
    <dei:EntityIncorporationStateCountryCode
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_50153c35-7a0d-4f4b-bff6-799f40400a28">DE</dei:EntityIncorporationStateCountryCode>
    <dei:EntityFileNumber
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_dadf339f-764e-4bd9-8f7c-82e534d033f0">001-39110</dei:EntityFileNumber>
    <dei:EntityTaxIdentificationNumber
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_da806d10-42e8-4350-a20c-33ede2e8e003">94-2276314</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_f965727d-e1d5-444f-ae55-e7d65910b559">16 Jonspin Road</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_d42baf75-78c8-4225-a451-2e8d2ef13c31">Wilmington</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_9e6b62a8-9b7a-490b-b6c3-f5173a83ac27">MA</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_ebfbfd97-16fa-41bc-afa7-4ff08d5299b5">01887</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_117766e2-3d4e-4da3-936a-a5ec493d64e0">(978)</dei:CityAreaCode>
    <dei:LocalPhoneNumber
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_00db2e61-7445-4bed-84b9-d5a51c8f1e1e">253-6200</dei:LocalPhoneNumber>
    <dei:EntityInformationFormerLegalOrRegisteredName
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_cf486385-46a6-4150-b432-079e9931d85f">Not applicable</dei:EntityInformationFormerLegalOrRegisteredName>
    <dei:WrittenCommunications
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_f1075d87-c5b1-4ae7-84f8-9fe222996fd0">false</dei:WrittenCommunications>
    <dei:SolicitingMaterial
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_839bc3e1-d13c-4c73-ad05-9a9b34b24c51">false</dei:SolicitingMaterial>
    <dei:PreCommencementTenderOffer
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_dbab98dd-504e-4b14-a255-32f19016655d">false</dei:PreCommencementTenderOffer>
    <dei:PreCommencementIssuerTenderOffer
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_e6574717-e77b-445b-9ffd-8e5a92425208">false</dei:PreCommencementIssuerTenderOffer>
    <dei:Security12bTitle
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_4ecb82af-b3bb-4d78-9fb8-12428c26fcb9">Common Stock, $0.001 par value per share</dei:Security12bTitle>
    <dei:TradingSymbol
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_1117f262-3c3f-4674-bda9-284472ed6f08">ONTO</dei:TradingSymbol>
    <dei:SecurityExchangeName
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_8402026b-830f-4818-8001-49874d5890a2">NYSE</dei:SecurityExchangeName>
    <dei:EntityEmergingGrowthCompany
      contextRef="C_ee245b72-bc7e-4b47-bed4-f334348856b8"
      id="F_84ac77aa-6ec5-446a-8ea0-63eba280bad8">false</dei:EntityEmergingGrowthCompany>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
