Overview and Basis of Presentation (Policies)	9 Months Ended
Overview and Basis of Presentation (Policies)	Sep. 30, 2023
Organization, Consolidation and Presentation of Financial Statements [Abstract]
Basis of Presentation	Basis of Presentation The accompanying interim consolidated financial statements are unaudited, and certain related information and footnote disclosures normally included in financial statements prepared in accordance with accounting principles generally accepted in the United States of America (“GAAP”) have been omitted in accordance with Rule 10-01 of Regulation S-X. They were prepared following the same policies and procedures used in the preparation of our annual financial statements. The accompanying interim consolidated financial statements reflect all adjustments (consisting of normal recurring adjustments) necessary for a fair statement of results for the periods presented. The Consolidated Balance Sheet as of December 31, 2022 was derived from the audited financial statements included in our annual report on Form 10-K for the year ended December 31, 2022. The results of operations for the interim periods are not necessarily indicative of the results for the fiscal year. These consolidated financial statements should be read in conjunction with our annual consolidated financial statements for the year ended December 31, 2022 included within our annual report on Form 10-K. In the second quarter of 2023, we determined the lower than previously projected actual and forecasted financial performance of our Semiconductor and Alluxa reporting units, to be a triggering event for an interim goodwill impairment test for each of these reporting units and, as a result, we performed an assessment for each of these reporting units as of June 30, 2023. We determined the book value of our Alluxa reporting unit exceeded its fair value as of June 30, 2023 and, as a result, we impaired the $60.8 million of goodwill related to Alluxa in the second quarter of 2023. After this full impairment, our Consolidated Balance Sheet reflects no goodwill related to Alluxa. The fair value of our Semiconductor reporting unit, which had $532.2 million of goodwill as of our interim testing date of June 30, 2023, exceeded its carrying value by approximately 10%. If the annual growth rates in our projected revenues over each of the next four years were 1% lower than projected in our interim test, we estimate the fair value of the Semiconductor reporting unit would exceed its carrying value by approximately 8%. A change in assumptions used in the testing of the Semiconductor reporting unit's goodwill for impairment, such as an increase in the discount rate, inability to meet the projections used in the test, or a decline in market multiples could result in the Semiconductor reporting unit’s fair value dropping below the carrying value of its assets, resulting in impairment. We reviewed the performance and current outlook for the semiconductor reporting unit as of September 30, 2023 and concluded that there was not a triggering event necessitating an interim goodwill impairment assessment. We will conduct our annual goodwill impairment assessment of all reporting units with goodwill as of November 1, 2023. The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amount of assets and liabilities and the disclosures regarding contingent assets and liabilities at period end and the reported amounts of revenue and expenses during the reporting period. All intercompany accounts and transactions between our consolidated operations have been eliminated.