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Overview and Basis of Presentation (Details) - USD ($)
$ in Millions
 6 Months Ended
Jun. 30, 2023
Sep. 30, 2023
Dec. 31, 2022
New Accounting Pronouncements or Change in Accounting Principle      
Goodwill   $ 805.2 $ 863.8
Alluxa Inc      
New Accounting Pronouncements or Change in Accounting Principle      
Goodwill $ 60.8    
Semiconductor      
New Accounting Pronouncements or Change in Accounting Principle      
Goodwill $ 532.2    
Percentage above carrying value (as a percent) 10.00%    
Goodwill, measurement input impact of increase period (in years) 4 years    
Reporting unit, impact of a one percent point increase in weighted average cost of capital (as a percent) 8.00%