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Stock-Based Compensation (Tables) | 12 Months Ended
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Dec. 28, 2019
Summary of weighted average fair value at the date of grant | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | Year Ended
​ | ​ | December 28, | ​ | December 29, | ​ | December 30,
​ |  | 2019 |  | 2018 |  | 2017
Per grant of RSAs and RSUs | ​ | $ | 89.35 |  | $ | 93.75 |  | $ | 72.85
Per grant of PSUs and MSUs | ​ | $ | 85.79 |  | $ | 97.53 |  | $ | 78.40
Summary of stock-based payment and stock option values | The following summarizes the Company’s stock-based payment and stock option values (in thousands):
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | Year Ended
​ | ​ | December 28, | ​ | December 29, | ​ | December 30,
​ |  | 2019 |  | 2018 |  | 2017
Intrinsic value of stock options exercised | ​ | $ | — | ​ | $ | 1,952 | ​ | $ | 2,174
Intrinsic value of RSUs that vested | ​ | $ | 57,693 | ​ | $ | 68,012 | ​ | $ | 53,093
Grant date fair value of RSUs that vested | ​ | $ | 40,434 | ​ | $ | 37,720 | ​ | $ | 32,449
Intrinsic value of MSUs that vested | ​ | $ | 3,649 | ​ | $ | 3,562 | ​ | $ | 687
Grant date fair value of PSUs and MSUs that vested | ​ | $ | 1,461 | ​ | $ | 1,788 | ​ | $ | 633
Schedule of stock-based compensation costs recognized in the Condensed Consolidated Statements of Income | The following table presents details of stock-based compensation costs recognized in the Consolidated Statements of Income (in thousands):
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | Year Ended
​ | ​ | December 28, | ​ | December 29, | ​ | December 30,
​ |  | 2019 |  | 2018 |  | 2017
Cost of revenues | ​ | $ | 1,316 | ​ | $ | 1,238 | ​ | $ | 1,090
Research and development | ​ |  | 26,187 | ​ |  | 23,867 | ​ |  | 21,771
Selling, general and administrative | ​ |  | 27,296 | ​ |  | 24,972 | ​ |  | 21,891
​ | ​ |  | 54,799 | ​ |  | 50,077 | ​ |  | 44,752
Income tax benefit | ​ |  | 2,476 | ​ |  | 8,890 | ​ |  | 11,073
​ | ​ | $ | 52,323 | ​ | $ | 41,187 | ​ | $ | 33,679
Summary of shares reserved of common stock for future issuance | As of December 28, 2019, the Company had reserved shares of common stock for future issuance as follows (in thousands):
​ | ​ | ​
2009 Stock Incentive Plan |  | 1,815
2009 Employee Stock Purchase Plan |  | 777
Total shares reserved |  | 2,592
Stock options |
Summary of stock-based compensation activity, options | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | ​ | ​ | Weighted- | ​ | Weighted-Average | ​ | Aggregate
​ | ​ | ​ | ​ | Average | ​ | Remaining | ​ | Intrinsic
​ | ​ | Shares | ​ | Exercise | ​ | Contractual Term | ​ | Value
Stock Options |  | (000s) |  | Price |  | (In Years) |  | (000s)
Outstanding at December 29, 2018 |  | 137 | ​ | $ | 39.47 | ​ | ​ | ​ | ​ | ​
Outstanding at December 28, 2019 |  | 137 | ​ | $ | 39.47 |  | 6.13 | ​ | $ | 10,515
Vested at December 28, 2019 and expected to vest |  | 43 | ​ | $ | 40.39 |  | 6.12 | ​ | $ | 3,265
Exercisable at December 28, 2019 |  | 93 | ​ | $ | 39.04 |  | 6.13 | ​ | $ | 7,224
MSUs |
Summary of assumptions used to estimate fair values for MSUs, Monte Carlo simulation | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | Year Ended |
​ | ​ | December 28, | ​ | December 29, | ​ | December 30, | ​
MSUs |  | 2019 |  | 2018 |  | 2017 |
Expected volatility |  | 31 | % | 29 | % | 31 | %
Risk-free interest rate % |  | 2.4 | ​ | 2.4 | % | 1.6 | %
Expected term (in years) |  | 2.9 | ​ | 2.9 | ​ | 2.9 | ​
Dividend yield |  | — | ​ | — | ​ | — | ​
RSAs and RSUs |
Summary of stock-based compensation activity, RSAs and RSUs | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ |  | ​ | ​ | Weighted- | ​ | Weighted-Average | ​ | Aggregate
​ | ​ | ​ | ​ | Average | ​ | Remaining | ​ | Intrinsic
​ | ​ | Shares | ​ | Purchase | ​ | Vesting Term | ​ | Value
RSAs and RSUs |  | (000s) |  | Price |  | (In Years) |  | (000s)
Outstanding at December 29, 2018 |  | 1,218 | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Granted |  | 576 | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Vested or issued |  | (639) | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Cancelled or forfeited |  | (71) | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Outstanding at December 28, 2019 |  | 1,084 | ​ | $ | — |  | 0.95 | ​ | $ | 126,259
Outstanding at December 28, 2019 and expected to vest |  | 1,014 | ​ | $ | — |  | 0.95 | ​ | $ | 118,106
PSUs and MSUs |
Summary of stock-based compensation activity, PSUs and MSUs | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | ​ | ​ | Weighted- |  | Weighted-Average | ​ | Aggregate
​ | ​ | ​ | ​ | Average | ​ | Remaining | ​ | Intrinsic
​ | ​ | Shares | ​ | Purchase | ​ | Vesting Term | ​ | Value
PSUs and MSUs |  | (000s) |  | Price |  | (In Years) |  | (000s)
Outstanding at December 29, 2018 |  | 282 |  | $ | — | ​ | ​ | ​ | ​ | ​
Granted |  | 93 | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Earned or issued |  | (43) | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Cancelled or forfeited |  | (70) | ​ | $ | — | ​ | ​ | ​ | ​ | ​
Outstanding at December 28, 2019 |  | 262 | ​ | $ | — |  | 1.04 |  | $ | 30,583
Outstanding at December 28, 2019 and expected to vest |  | 244 |  | $ | — |  | 1.04 |  | $ | 28,418
2009 Employee Stock Purchase Plan |
Summary of assumptions used to estimate fair values for ESPP | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | Year Ended |
​ | ​ | December 28, | ​ | December 29, | ​ | December 30, | ​
Employee Stock Purchase Plan |  | 2019 |  | 2018 |  | 2017 | ​
Expected volatility | ​ | 37 | % | 30 | % | 28 | %
Risk-free interest rate % | ​ | 1.6 | % | 2.4 | % | 1.1 | %
Expected term (in months) | ​ | 9 | ​ | 9 | ​ | 8 | ​
Dividend yield | ​ | — | ​ | — | ​ | — | ​

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