0001113232-02-000007 10-K/A 2 20011231 20020628 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 10-K/A 34 000-30941 02691730 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 10-K/A 1 form10ka.htm AXCELIS TECHNOLOGIES, INC. EX-23 3 ex23_2.txt CONSENT OF ERNST & YOUNG LLP