0001181431-02-001433 4 1 20021028 20021028 FALLON LYNNETTE C 0001195654 OFFICER 4 AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 4 34 000-30941 02799466 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd1508.htm OCTOBER 28 FORM 4