0001181431-02-003375 4 1 20021220 20021223 LUTTATI MICHAEL J 0001195649 OFFICER 4 AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 4 34 000-30941 02866246 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd2739.htm LUTTATI DEC. 2002 OPTIONS FORM 4